硅片行业术语大全(20180720154242)-solarbe文库

资源描述：

硅片行业术语大全（中英对照）2010-11-15 161900 来源互联网Acceptor - An element, such as boron, indium, and gallium used to create a freehole in a semiconductor. The acceptor atoms are required to have one less valenceelectron than the semiconductor. 光伏网受主 - 一种用来在半导体中形成空穴的元素，比如硼、铟和镓。受主原子必须比半导体元素少一价电子 pv001.net Alignment Precision - Displacement of patterns that occurs during thephotolithography process. pv001· net套准精度 - 在光刻工艺中转移图形的精度。 pv001.net Anisotropic - A process of etching that has very little or no undercuttingpv001.net 各向异性 - 在蚀刻过程中，只做少量或不做侧向凹刻。 pv001.net Area Contamination - Any foreign particles or material that are found on thesurface of a wafer. This is viewed as discolored or smudged, and it is the resultof stains, fingerprints, water spots, etc. 中国光伏材料设备网沾污区域 - 任何在晶圆片表面的外来粒子或物质。由沾污、手印和水滴产生的污染。中国光伏材料设备网Azimuth, in Ellipsometry - The angle measured between the plane of incidenceand the major axis of the ellipse. www.pv001.net 椭圆方位角 - 测量入射面和主晶轴之间的角度。 pv001.net Backside - The bottom surface of a silicon wafer. Note This term is notpreferred; instead, use ‘ back surface ’ . 中国光伏网背面 - 晶圆片的底部表面。（注不推荐该术语，建议使用“背部表面”） pv001.net Base Silicon Layer - The silicon wafer that is located underneath the insulatorlayer, which supports the silicon film on top of the wafer. 光伏材料设备网底部硅层 - 在绝缘层下部的晶圆片，是顶部硅层的基础。 pv001 Bipolar - Transistors that are able to use both holes and electrons as chargecarriers. www.pv001.net 双极晶体管 - 能够采用空穴和电子传导电荷的晶体管。中国光伏网Bonded Wafers - Two silicon wafers that have been bonded together by silicondioxide, which acts as an insulating layer. pv001.net 绑定晶圆片 - 两个晶圆片通过二氧化硅层结合到一起，作为绝缘层。 www.pv001.net Bonding Interface - The area where the bonding of two wafers occurs.www.pv001.net 绑定面 - 两个晶圆片结合的接触区。 pv001 Buried Layer - A path of low resistance for a current moving in a device. Manyof these dopants are antimony and arsenic. 中国光伏材料设备网埋层 - 为了电路电流流动而形成的低电阻路径，搀杂剂是锑和砷。 pv001· netBuried Oxide Layer BOX - The layer that insulates between the two wafers.pv001· net氧化埋层 BOX - 在两个晶圆片间的绝缘层。 pv001· netCarrier - Valence holes and conduction electrons that are capable of carryinga charge through a solid surface in a silicon wafer. pv001· net载流子 - 晶圆片中用来传导电流的空穴或电子。 pv001.net Chemical-Mechanical Polish CMP - A process of flattening and polishing wafersthat utilizes both chemical removal and mechanical buffing. It is used duringthe fabrication process. 光伏网化学 -机械抛光 CMP - 平整和抛光晶圆片的工艺，采用化学移除和机械抛光两种方式。此工艺在前道工艺中使用。 pv001· netChuck Mark - A mark found on either surface of a wafer, caused by either a roboticend effector, a chuck, or a wand. 光伏材料设备网卡盘痕迹 - 在晶圆片任意表面发现的由机械手、卡盘或托盘造成的痕迹。 pv001· netCleavage Plane - A fracture plane that is preferred. pv001 解理面 - 破裂面 pv001· netCrack - A mark found on a wafer that is greater than 0.25 mm in length. pv001.net 裂纹 - 长度大于 0.25 毫米的晶圆片表面微痕。光伏网Crater - Visible under diffused illumination, a surface imperfection on a waferthat can be distinguished individually. pv001· net微坑 - 在扩散照明下可见的，晶圆片表面可区分的缺陷。 pv001.net Conductivity electrical - A measurement of how easily charge carriers can flowthroughout a material. pv001· net传导性（电学方面） - 一种关于载流子通过物质难易度的测量指标 www.pv001.net 。 pv001· netConductivity Type - The type of charge carriers in a wafer, such as “N - type ”and “P - type ”. pv001· net导电类型 - 晶圆片中载流子的类型， N 型和 P 型。 www.pv001.net Contaminant, Particulate see light point defect pv001 污染微粒 www.pv001.net （参见光点缺陷） pv001.net Contamination Area - An area that contains particles that can negatively affectthe characteristics of a silicon wafer. pv001.net 沾污区域 - 部分晶圆片区域被颗粒沾污，造成不利特性影响。中国光伏网Contamination Particulate - Particles found on the surface of a silicon wafer.pv001· net沾污颗粒 - 晶圆片表面上的颗粒。光伏网Crystal Defect - Parts of the crystal that contain vacancies and dislocationsthat can have an impact on a circuit ’s electrical performance. pv001· net晶体缺陷 - 部分晶体包含的、会影响电路性能的空隙和层错。 pv001 Crystal Indices see Miller indices 中国光伏材料设备网晶体指数 pv001 （参见米勒指数）中国光伏材料设备网Depletion Layer - A region on a wafer that contains an electrical field thatsweeps out charge carriers. 中国光伏材料设备网耗尽层 - 晶圆片上的电场区域，此区域排除载流子。中国光伏网Dimple - A concave depression found on the surface of a wafer that is visibleto the eye under the correct lighting conditions. pv001.net 表面起伏 - 在合适的光线下通过肉眼可以发现的晶圆片表面凹陷。 pv001 Donor - A contaminate that has donated extra “ free ” electrons, thus makinga wafer “N - Type”. pv001 施主 - 可提供“自由”电子的搀杂物，使晶圆片呈现为 N型。 www.pv001.net Dopant - An element that contributes an electron or a hole to the conductionprocess, thus altering the conductivity. Dopants for silicon wafers are foundin Groups III and V of the Periodic Table of the Elements. www.pv001.net 搀杂剂 - 可以为传导过程提供电子或空穴的元素，此元素可以改变传导特性。晶圆片搀杂 pv001.net 剂可以在元素周期表的 III 和 V 族元素中发现。 pv001.net Doping - The process of the donation of an electron or hole to the conductionprocess by a dopant. pv001 掺杂 - 把搀杂剂掺入半导体，通常通过扩散或离子注入工艺实现。 pv001· netEdge Chip and Indent - An edge imperfection that is greater than 0.25 mm. 光伏网芯片边缘和缩进 - 晶片中不完整的边缘部分超过 0.25 毫米。光伏网Edge Exclusion Area - The area located between the fixed quality area and theperiphery of a wafer. This varies according to the dimensions of the wafer.中国光伏网边缘排除区域 - 位于质量保证区和晶圆片外围之间的区域。（根据晶圆片的尺寸不同而有所不同。） www.pv001.net Edge Exclusion, Nominal EE - The distance between the fixed quality area andthe periphery of a wafer. www.pv001.net 名义上边缘排除 EE - 质量保证区和晶圆片外围之间的距离。中国光伏材料设备网Edge Profile - The edges of two bonded wafers that have been shaped eitherchemically or mechanically. 光伏材料设备网边缘轮廓 - 通过化学或机械方法连接起来的两个晶圆片边缘。 pv001· netpv001 Etch - A process of chemical reactions or physical removal to rid the wafer ofexcess materials. pv001.net 蚀刻 - 通过化学反应或物理方法去除晶圆片的多余物质。 pv001 Fixed Quality Area FQA - The area that is most central on a wafer surface.光伏材料设备网质量保证区 FQA - 晶圆片表面中央的大部分。 pv001 Flat - A section of the perimeter of a wafer that has been removed for waferorientation purposes. pv001 平边 - 晶圆片圆周上的一个小平面，作为晶向定位的依据。 pv001.net Flat Diameter - The measurement from the center of the flat through the centerof the wafer to the opposite edge of the wafer. Perpendicular to the flatpv001· net平口直径 - 由小平面的中心通过晶圆片中心到对面边缘的直线距离。 pv001· netFour-Point Probe - Test equipment used to test resistivity of wafers. pv001 四探针 - 测量半导体晶片表面电阻的设备。 www.pv001.net Furnace and Thermal Processes - Equipment with a temperature gauge used forprocessing wafers. A constant temperature is required for the process. 光伏材料设备网炉管和热处理 - 温度测量的工艺设备，具有恒定的处理温度。 www.pv001.net Front Side - The top side of a silicon wafer. This term is not preferred; usefront surface instead. pv001.net 正面 - 晶圆片的顶部表面（此术语不推荐，建议使用“前部表面”）。光伏材料设备网Goniometer - An instrument used in measuring angles. pv001.net 角度计 - 用来测量角度的设备。 pv001 Gradient, Resistivity not preferred; see resistivity variation pv001· net电阻梯度 pv001· net（不推荐使用，参见“电阻变化”） pv001.net Groove - A scratch that was not completely polished out. 中国光伏材料设备网凹槽 - 没有被完全清除的擦伤。 pv001 Hand Scribe Mark - A marking that is hand scratched onto the back surface ofa wafer for identification purposes. 光伏材料设备网手工印记 - 为区分不同的晶圆片而手工在背面做出的标记。 pv001· netHaze - A mass concentration of surface imperfections, often giving a hazyappearance to the wafer. pv001· net雾度 - 晶圆片表面大量的缺陷，常常表现为晶圆片表面呈雾状。中国光伏材料设备网Hole - Similar to a positive charge, this is caused by the absence of a valenceelectron. pv001.net 空穴 - 和正电荷类似，是由缺少价电子引起的。光伏网Ingot - A cylindrical solid made of polycrystalline or single crystal siliconfrom which wafers are cut. pv001 晶锭 - 由多晶或单晶形成的圆柱体，晶圆片由此切割而成。 www.pv001.net Laser Light-Scattering Event - A signal pulse that locates surface imperfectionson a wafer. pv001.net 激光散射 - 由晶圆片表面缺陷引起的脉冲信号。光伏网Lay - The main direction of surface texture on a wafer. 中国光伏网层 - 晶圆片表面结构的主要方向。 www.pv001.net Light Point Defect LPD Not preferred; see localized light-scatterer 中国光伏材料设备网光点缺陷 LPD （不推荐使用，参见“局部光散射”）中国光伏材料设备网Lithography - The process used to transfer patterns onto wafers. pv001.net 光刻 - 从掩膜到圆片转移的过程。 www.pv001.net Localized Light-Scatterer - One feature on the surface of a wafer, such as apit or a scratch that scatters light. It is also called a light point defect.pv001· net局部光散射 - 晶圆片表面特征，例如小坑或擦伤导致光线散射，也称为光点缺陷。pv001.net 中国光伏网Lot - Wafers of similar sizes and characteristics placed together in a shipment.pv001· net批次 - 具有相似尺寸和特性的晶圆片一并放置在一个载片器内。 www.pv001.net Majority Carrier - A carrier, either a hole or an electron that is dominant ina specific region, such as electrons in an N-Type area. www.pv001.net 多数载流子 - 一种载流子，在半导体材料中起支配作用的空穴或电子，例如在 N型中是电子。 pv001 Mechanical Test Wafer - A silicon wafer used for testing purposes. pv001 机械测试晶圆片 - 用于测试的晶圆片。光伏网Microroughness - Surface roughness with spacing between the impurities with ameasurement of less than 100 μ m. pv001· net微粗糙 - 小于 100 微米的表面粗糙部分。光伏网Miller Indices, of a Crystallographic Plane - A system that utilizes threenumbers to identify plan orientation in a crystal. 中国光伏材料设备网Miller 索指数 - 三个整数，用于确定某个并行面。这些整数是来自相同系统的基本向量。中国光伏材料设备网Minimal Conditions or Dimensions - The allowable conditions for determiningwhether or not a wafer is considered acceptable. pv001.net 最小条件或方向 - 确定晶圆片是否合格的允许条件。 www.pv001.net Minority Carrier - A carrier, either a hole or an electron that is not dominantin a specific region, such as electrons in a P-Type area. 光伏网少数载流子 - 在半导体材料中不起支配作用的移动电荷，在 P 型中是电子，在 N型中是空穴。光伏材料设备网Mound - A raised defect on the surface of a wafer measuring more than 0.25 mm.光伏材料设备网堆垛 - 晶圆片表面超过 0.25 毫米的缺陷。 pv001· netNotch - An indent on the edge of a wafer used for orientation purposes.www.pv001.net 凹槽 - 晶圆片边缘上用于晶向定位的小凹槽。 pv001 Orange Peel - A roughened surface that is visible to the unaided eye. pv001· net桔皮 - 可以用肉眼看到的粗糙表面中国光伏网Orthogonal Misorientation - www.pv001.net 直角定向误差 - pv001.net Particle - A small piece of material found on a wafer that is not connected withit. pv001· net 颗粒 - 晶圆片上的细小物质。 pv001· netParticle Counting - Wafers that are used to test tools for particle contamination.pv001· net颗粒计算 - 用来测试晶圆片颗粒污染的测试工具。 pv001· netParticulate Contamination - Particles found on the surface of a wafer. Theyappear as bright points when a collineated light is shined on the wafer. 中国光伏网颗粒污染 - 晶圆片表面的颗粒。 pv001· netPit - A non-removable imperfection found on the surface of a wafer. 中国光伏网深坑 - 一种晶圆片表面无法消除的缺陷。 www.pv001.net Point Defect - A crystal defect that is an impurity, such as a lattice vacancyor an interstitial atom. www.pv001.net 点缺陷 - 不纯净的晶缺陷，例如格子空缺或原子空隙。 pv001· netPreferential Etch - www.pv001.net 优先蚀刻 - pv001.net Premium Wafer - A wafer that can be used for particle counting, measuring patternresolution in the photolithography process, and metal contamination monitoring.This wafer has very strict specifications for a specific usage, but looserspecifications than the prime wafer. www.pv001.net 测试晶圆片 - 影印过程中用于颗粒计算、测量溶解度和检测金属污染的晶圆片。对于具体应用该晶圆片有严格的要求，但是要比主晶圆片要求宽松些。 www.pv001.net Primary Orientation Flat - The longest flat found on the wafer. pv001· net主定位边 - 晶圆片上最长的定位边。 www.pv001.net Process Test Wafer - A wafer that can be used for processes as well as areacleanliness. 中国光伏材料设备网加工测试晶圆片 - 用于区域清洁过程中的晶圆片。 pv001 Profilometer - A tool that is used for measuring surface topography. 光伏网表面形貌剂 - 一种用来测量晶圆片表面形貌的工具。 pv001· netResistivity Electrical - The amount of difficulty that charged carriers havein moving throughout material. pv001· net电阻率（电学方面） - 材料反抗或对抗电荷在其中通过的一种物理特性。 www.pv001.net Required - The minimum specifications needed by the customer when ordering wafers.www.pv001.net 必需 - 订购晶圆片时客户必须达到的最小规格。 pv001· netRoughness - The texture found on the surface of the wafer that is spaced veryclosely together. pv001 粗糙度 - 晶圆片表面间隙很小的纹理。 www.pv001.net Saw Marks - Surface irregularities 中国光伏材料设备网锯痕 - 表面不规则。 pv001 Scan Direction - In the flatness calculation, the direction of the subsites.pv001.net 扫描方向 - 平整度测量中，局部平面的方向。 pv001.net Scanner Site Flatness - pv001 局部平整度扫描仪 - pv001.net Scratch - A mark that is found on the wafer surface. pv001.net 擦伤 - 晶圆片表面的痕迹。 pv001· netSecondary Flat - A flat that is smaller than the primary orientation flat. Theposition of this flat determines what type the wafer is, and also the orientationof the wafer. pv001 第二定位边 - 比主定位边小的定位边，它的位置决定了晶圆片的类型和晶向。pv001· netShape - www.pv001.net 形状 - 中国光伏网Site - An area on the front surface of the wafer that has sides parallel andperpendicular to the primary orientation flat. This area is rectangular in shape光伏网局部表面 - 晶圆片前面上平行或垂直于主定位边方向的区域。光伏材料设备网Site Array - a neighboring set of sites 光伏网局部表面系列 - 一系列的相关局部表面。 pv001· netSite Flatness - pv001.net 局部平整 - pv001 Slip - A defect pattern of small ridges found on the surface of the wafer. pv001划伤 - 晶圆片表面上的小皱造成的缺陷。 www.pv001.net Smudge - A defect or contamination found on the wafer caused by fingerprints.光伏网污迹 - 晶圆片上指纹造成的缺陷或污染。 pv001 Sori - pv001· netStriation - Defects or contaminations found in the shape of a helix. 中国光伏网条痕 - 螺纹上的缺陷或污染。 pv001.net Subsite, of a Site - An area found within the site, also rectangular. The centerof the subsite must be located within the original site. pv001.net 局部子表面 - 局部表面内的区域，也是矩形的。子站中心必须位于原始站点内部。中国光伏材料设备网Surface Texture - Variations found on the real surface of the wafer that deviatefrom the reference surface. 光伏材料设备网表面纹理 - 晶圆片实际面与参考面的差异情况。光伏材料设备网Test Wafer - A silicon wafer that is used in manufacturing for monitoring andtesting purposes. pv001· net测试晶圆片 - 用于生产中监测和测试的晶圆片。 www.pv001.net Thickness of Top Silicon Film - The distance found between the face of the topsilicon film and the surface of the oxide layer. pv001 顶部硅膜厚度 - 顶部硅层表面和氧化层表面间的距离。 pv001.net Top Silicon Film - The layer of silicon on which semiconductor devices are placed.This is located on top of the insulating layer. 中国光伏网顶部硅膜 - 生产半导体电路的硅层，位于绝缘层顶部。 pv001· netTotal Indicator Reading TIR - The smallest distance between planes on thesurface of the wafer. www.pv001.net 总计指示剂数 TIR - 晶圆片表面位面间的最短距离。中国光伏网Virgin Test Wafer - A wafer that has not been used in manufacturing or otherprocesses. 中国光伏材料设备网原始测试晶圆片 - 还没有用于生产或其他流程中的晶圆片。 www.pv001.net Void - The lack of any sort of bond particularly a chemical bond at the siteof bonding. pv001.net 无效 - 在应该绑定的地方没有绑定（特别是化学绑定）。 pv001.net Waves - Curves and contours found on the surface of the wafer that can be seenby the naked eye. www.pv001.net 波浪 - 晶圆片表面通过肉眼能发现的弯曲和曲线。 pv001.net Waviness - Widely spaced imperfections on the surface of a wafer. pv001 波纹 - 晶圆片表面经常出现的缺陷。中国光