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PV 制程真空或工艺真空的作用是机台内部机械手吸附硅片或真空吸笔（或叫真空小镊子）吸硅片来挑片用。半导体芯片设计版图芯片制造工艺制程封装测试 ,wafer,chip,ic,process,layout,pa ckage,FA,QA-GW bs5J3P5n一般机台对 PV 的真空度要求是－ 500mmHg ，所以真空吸笔一般负压也要－ 500mmHg 。PV 的单位表示为毫米汞柱或 Torr 、 bar 、 PSI 等 . 半导体芯片设计版图晶圆制造工艺制程封装测试 ,wafer,chip,ic,design,fabrication,p roce ss,layout,package,test,FA,RA,QA *C2i1bar7.5 102 次方 mmHg 或 Torr 、 1mmHg 或 Torr1.33322 10-3 次方 ba 厂务常用缩写字体小中大 | 打印发表于 2007-4-20 0854 作者 cecilcxm 来源半导体技术天地Abbreviation Full Name 中文說明HVAC CUP Central Utility Plant 中央動力廠房GEX General EXhaust 普通及熱排氣SEX Scrubber EXhaust 酸排氣VEX Volatile orgaic compound EXhaust 有機溶劑排氣AEX Ammonia EXhaust 鹼性排氣PCW Plant Cooling Water 工藝冷卻水PV Process Vacuum 工藝真空HV House Vacuum 真空吸塵CW City Water 自來水FMCS Faility Monitoring Contro System 廠務監控系統MCC Motor Control Center 馬達控制中心VFD Variable Frequency Device 變頻器CCTV Close Circuit Televsion 閉路電視PA Public Adress system 廣播系統FA Fire Alarm system 火災報警系統UPW Ultra Pure Water 超純水FWW Fluoride Waste Water 低濃度氫氟酸廢水IWW Industry Waste Water 工業廢水OWW Organic Waste Water 有機溶劑廢水DAHW Drain Amonia Hydride Waste 含氨廢水RCL Recycle water 製程回收循環水RCM Reclaim water 製程回收再利用水HFW High Fluoride Waste water 高濃度氫氟酸廢水BGW Backgriding Waste water 晶背研磨廢水SAW Sulfuric Acid Waste water 硫酸廢液PAW Phosphoric Acid Waste water 磷酸廢液SW Stripper Waste water 剝離液廢液TW Thinner Waste water 清洗廢液PIX Pix waste water PIX 廢液SLOW Oxide slurry waste water 介電質研磨廢水SLWP Metal slurry waste water 金屬研磨廢水SLWP Poly slurry waste water 多晶硅研磨廢水PN2 Process N2 製程用氮氣GN2 General N2 一般用氮氣CDA Compressor Dry Air 壓縮乾燥空氣VMB Valve Manifold Box 閥箱空調系統AHU Air Handling Unit 空调箱MAU Make-up Air Unit 外气空调箱VAV Variable Air Volume box 可变风量风箱FFU Fan Filter Unit 风车过滤器HEPA High Efficiency Particulate Filter 高效率过滤器ULPA Ultra Low Penetration Filter 超高效率过滤器A/S Air Shower 空气浴尘室CUP Central Utility Plant 中央動力廠房電力系統FMCS Faility Monitoring Control System 廠務監控系統MCC Motor Control Center 馬達控制中心VFD Variable Frequency Device 變頻器CCTV Close Circuit Televsion 閉路電視SCADA Supervisory Control And Data Acquisition 监视控制和数据搜集系统MCC Motor Control Center 馬達控制中心VFD Variable Frequency Device 變頻器水處理系統UPW Ultra Pure Water 超純水RO Reverse Osmosis 逆滲透膜TOC Total Organic Carbon 總有機碳MB Mixed Bed 混床UF UltraFiltration 超濾SC Strong Cation 強陽離子SA Strong Anion 強陰離子WA Weak Anion 弱陰離子DO Dissolved Oxygen 溶解氧MD Membrane Degasify 脫氣膜GF Gravity Filter 重力式過濾器 . DI Deionize 去離子水氣體 /化學系統CQC Continuous Quality Control 连续品质控制系统VMB Valve Manifold Box 閥箱VMP Valve Manifold Panel 閥盘GMS Gas Monitoring System 气体监测系统CDS Chemical Dispense System 化學系统SDS Slurry Dispense System 化學研磨系统环境安全卫生ESH Environment Safety Health 环境安全卫生SCBA Self Contained Brathing Apparatus 自给式空气呼吸器HVAC AHU Air Handling Unit 空调箱MAU Make-up Air Unit 外气空调箱VAV Variable Air Volume box 可变风量风箱FD Fire Damper 防火风门FSD combined Fire Smoke Damper 防火防烟风门SD Smoke Damper 防烟风门PHX Plated type Heat Exanger 板式热交换器FFU Fan Filter Unit 风车过滤器HEPA High Efficiency Particulate Filter 高效率过滤器ULPA Ultra Low Penetration Filter 超高效率过滤器A/S Air Shower 空气浴尘室A/L Air Lock 气闭门室DCC Dry Cooling Coil 干盤管FCU Fan Coil Unit 小型冷风机SF Smoke Fan 消防排烟风车EF Exhaust Fan 通风排气风车CUP Central Utility Plant 中央動力廠房GEX General EXhaust 普通及熱排氣SEX Scrubber EXhaust 酸排氣VEX Volatile orgaic compound EXhaust 有機溶劑排氣AEX Ammonia EXhaust 鹼性排氣PCW Process Cooling Water 工藝冷卻水PV Plant Vacuum 工藝真空HV House Vacuum 真空吸塵CW City Water 自來水FMCS Faility Monitoring Control System 廠務監控系統MCC Motor Control Center 馬達控制中心VFD Variable Frequency Device 變頻器CCTV Close Circuit Televsion 閉路電視PA Public Adress system 廣播系統FA Fire Alarm system 火災報警系統UPW Ultra Pure Water 超純水RO reverse Osmosis 逆滲透膜TOC total organic carbon 總有機碳MB mixed bed 混床UF ultrafiltration 超濾SC strong cation 強陽離子SA strong Anion 強陰離子WA weak Anion 弱陰離子DO dissolved oxygen 溶解氧MD membrane Degasify 脫氣膜GF gravity Filter 重力式過濾器 . DI deionize 去離子水FWW Fluoride Waste Water 低濃度氫氟酸廢水IWW Industry Waste Water 工業廢水OWW Organic Waste Water 有機溶劑廢水DAHW Drain Amonia Hydride Wastewater 含氨廢水RCL Recycle water 製程回收循環水RCM Reclaim water 製程回收再利用水HFW High Fluoride Waste 高濃度氫氟酸廢液BGW Backgriding Waste water 晶背研磨廢水SAW Sulfuric Acid Waste 硫酸廢液PAW Phosphoric Acid Waste 磷酸廢液SW Stripper Waste 剝離液廢液TW Thinner Waste 清洗廢液PIX PIX waste PIX 廢液SLW-O SLurry Wastewater Oxide 介電質研磨廢水SLW-M SLurry Wastewater Metal 金屬研磨廢水SLW-P SLurry Wastewater Poly 多晶硅研磨廢水PN2 Process N2 製程用氮氣GN2 General N2 一般用氮氣CDA Compressor Dry Air 壓縮乾燥空氣VMB Valve Manifold Box 閥箱ESH ESH Environment Safety Health 环境安全卫生SCBA Self Contained Brathing Apparatus 自给式空气呼吸器ISO International Organization for Standardization 国际标准化组织[ 本帖最后由 cecilcxm 于 2007-4-20 0915 编辑 ] r