韩璐《隆基大尺寸超薄单晶硅片助力异质结电池量产化进程》-solarbe文库

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LONGi Silicon 硅片事业部 2020.6.19 苏州隆基大尺寸超薄单晶硅片助力异质结电池量产化进程 2LONGi Confidential CONTENTS目录硅片尺寸发展历程他山之石半导体）第一性原理供应链生态问题硅片厚度的影响大尺寸量产数据及品质表现大尺寸组件案例及系统端分析N型品质改善及研究进展趋势分析及未来展望Why M6/18XM6/18X AdvantagesN type wafer analysisLook Forward to the Future 2020年如何实现430Wp组件如何实现0.2/Wp成本 PolySolar Wafer CellThe Solar PV module value proposition had been mostly about the lowest production cost Solar PV SystemHigh efficiency modules lower BOS costs and improve overall system economicsHigher efficiency means fewer modules, less mounting hardware, smaller land, etc.价值链向高效、高功率转移 Value Proposition of High Power Modules DownstreamUpstreamLower Module Cost Lower BOS 3LONGi Confidential Why M6/18X 4LONGi Confidential 125*16615483mm2 156*20023895mm2 156.75*20524284mm2 156.75*21024432mm2 158.75*22325199mm2 161.7*21125825mm2 166*22327415mm2 18X*24X3XXXXmm2 硅片尺寸发展史Wafer Geometry size Evolution 156.75FSQ 157 158.75157.25FSQ157.75157.35 157.25157.4 2018-2020缩小余量摊薄成本设备极限（185）M4 5LONGi Confidential 1 8 XM6 18XG1 越大越有力量Size Matters 6LONGi Confidential 他山之石半导体器件工艺流程硅片 Front-end 制程 Back-end 制程 l 扩散l 光刻l 刻蚀l 离子注入l 薄膜生长l 抛光l 金属化l 长晶l 切片l 研磨l 蚀刻l 抛光l 清洗 l 磨片l 划片l 装片l 键合l 塑封l 电镀l 打印 7LONGi Confidential 19600.525”19661.5”19754”19795”19816”19848”199112”More area More chips/wafer Fewer wafer starts Reduced Cost For CustomersIntel、TSMC、Samsung 18” prototype 2012 8LONGi Confidential 硅片尺寸发展史Wafer Geometry size Evolution 第一性原理供应链生态系统（材料，设备， etc.）一个产品推向市场的时间是否正确取决于是否有能力或者说花费较小的资源改变整个生态系统。 9LONGi Confidential THICKNESS MATTERS 1 7 0 μm1 0 μm1 0 μm1 0 μmWafer weightWafer breakage ratioCell efficiency 10LONGi Confidential 半导体硅片厚度发展历程Historical thickness trends--- SEMI Wafer Diameters, mm 150 200 300 400 450Wafer Thickness, um 675 725 775 825 800 825 850 875Area Scaling Coefficient - 1.77 2.25 1.77 2.25 2.25 2.25 2.25Wafer Weight, g 28 53 128 241 296 306 315 324During diameter scaling thickness was historically increased by 50 μmThickness for 400mm 450mm wafers proposed by SSi CRI 11LONGi Confidential 选择M6/18X的原因Why M6/18X扩散/退火/管P等炉管直径串焊设备焊接能力流水线尺寸版P石墨框大小电池、组件制造端使用大尺寸硅片的限制因素n M6/18X单晶硅片的制造完全兼容现有长晶、切片产能；n 选择M6/18X规格考虑到了现有电池、组件产线的兼容问题与改造成本。 12LONGi Confidential l 单晶炉兼容M6圆棒l 机加设备满足M6、18X要求l 切断设备接近上限 l 切片机兼容M6/18X硅片l 清洗花篮需重新设计l 分选机微调 l 扩散炉、PECVD、丝网印刷机最大兼容M6/18X硅片电池M6/18X现阶段产业链尺寸上限组件l 排版串焊与层压设备满足M6/18X，但均接近极限 13LONGi Confidential 选择M6/18X的原因Why M6/18X M6硅片规格M6 wafer specification Oi≤16ppmaLT≥50μsRes Current range 当前主流电阻范围 Phosphorus/other dopant feasible 可制备N型166±0.25mm223±0.25mm90±0.2°8.55±0.5mm 14LONGi Confidential LONGi M6 隆基拉晶轻松实现 Easy realization of pulling 直径灵活调整Diameter Flexible229D 158.75*223 166*223 15LONGi Confidential 18X*24X 18XG1 隆基切片灵活切换 Slicing flexible switching 边长灵活调整Length FlexibleCurrent SlicerMAX 174mm 156.75Length 16LONGi Confidential 166*223 18X*24X18X G1158.75*223 M6/18X Advantages 17LONGi Confidential Ref Simulation-based efficiency gain analysis of 21.2-efficient screenprinted PERC solar cells，6th International Conference on Silicon Photovoltaics, SiliconPV 2016.低基体复合合适体电阻率硅片内在质量核心指标PERC电池效率提升手段在电阻率合适条件下，低基体复合要求硅片具有更高的少子寿命，即更低的氧，碳，金属和缺陷浓度。单晶品质分析Quality analysis硅片内在指标对PERC电池效率支撑电阻率对效率贡献基体复合对效率影响 18LONGi Confidential 0.0 4.0 8.0 12.0 16.0 20.0 1 2 3 4 5 6 7 8 9 10 低氧-氧含量普通氧-氧含量 0 3,000 6,000 9,000 12,000 15,000 1 2 3 4 5 6 7 8 9 10 低氧-寿命普通氧-寿命Oxygen/ppma Lifetime/μs Low-Oxygen IngotEff 0.06 氧含量对单晶硅片品质及电池影响 Effect of oxygen content on mono wafer quality and cell 研发低氧晶棒明显具有更低氧含量, 在晶棒寿命基本相同情况下，低氧晶棒效率均值较常规氧效率均值高0.06。The average efficiency of low oxygen content ingot is 0.06 higher than the normal under the same lifetime range. 19Brick Brick 单晶品质分析Quality analysis 对于HIT电池当施主浓度接近1e15时，转化效率有近1下降；When the thermal donor concentration is close to 1e15, the efficiency of HJT cell decreases by nearly 1.浙江大学发表于Solar Energy Materials and Solar Cell，Volume 179, 1 June 20182121.221.421.621.822 22.222.422.6050010001500200025003000350040004500 0.1 0.8 1.1 2.7 7.1 7.5寿命-WCT120转化效率Lifetime/μs Eff氧施主效应对HIT电池效率影响氧施主TD应小于5E14才不会对效率产生影响。单晶氧施主对HIT电池影响 Effect of the oxygen donor on the efficiency of N-type cell 20 CEA实验室对氧施主研究施主浓度/E14 单晶品质分析Quality analysis 5.00E176.00E177.00E178.00E179.00E17 0 20 40 60 80 100 120氧含量（atoms/cm3）半径/mmM6和M2规格生长界面径向氧分布M6规格M2规格氧含量分布及与M2对比 M6和M2头部氧含量实际产出数据CGSIM模拟结果显示等径头部M6硅片的中心氧含量略低于M2硅片，调整后氧含量径向分布基本一致；M6和M2晶体实际头部氧含量基本持平。注CGSim模拟，保证热场条件一致。 21LONGi Confidential 大尺寸单晶品质分析Large size Wafer Quality 尾部B面少子寿命/碳分布及与M2对比尾部圆棒切断后测试大数据统计，M2/M6千万片量级数据比较无差异。 22LONGi Confidential 1 0 0 9 9 9 3 7 9 1 0 0 9 8 9 1 6 9 0 2 0 4 0 6 0 8 0 1 0 0 ＞2 0 μs＞7 0 μs＞1 0 0 μs＞1 5 0 μsM2 vs M6 Tail Lifetime Achievement M2 M61 0 0 5 2 1 7 1 0 0 3 5 8 0 2 0 4 0 6 0 8 0 1 0 0 ＜1＜0 .5＜0 .2M2 vs M6 Tail Cs Achievement M2 M6 大尺寸单晶品质分析Large size Wafer Quality 表面性能与M2对比Control lineTTV 27μmSawmark 15μm 切片后测试大数据统计，M2/M6千万片量级表面重要性能数据比较无差异。 23LONGi Confidential 020 406080100 30μm 15μm 11μm 8μmTTV M2 M6 020406080100 15μm 13μm 10μm 7μmSawmark M2 M6 大尺寸单晶品质分析Large size Wafer Quality AREA2983.6mm2↑ AREA3.14 ↑767.7mm2↑ AREA5.7 ↑1393.5mm2↑ 216D 217D 229D156.75*210 158.75*223 166*223161.7*211 24LONGi Confidential 采用M6/18X单晶硅片，面积分别较M2提升12.21、32，直接带来组件功率的提升。 M6/18X产品价值M6/18X product value 18X*24X18XAREA3XXXXmm2↑ G1 硅片规格与组件功率M6 wafer To Module Power 385W144半片组件功率 406.9W5.70 397.1W3.14 432.0W12.21 采用M6/18X单晶硅片，使用目前主流PERC电池，即可实现430W/500W以上的组件功率 25LONGi Confidential M6/18X产品价值M6/18X product value 18X500.0W32G1 Look Forward to the Future 26LONGi Confidential SIZE MATTERS Cz CCz大热场，CCZ， etc. 27LONGi Confidential 4 .5 7 .5 1 5 2 8 3 6 6 501 02 03 04 05 06 07 0 2 0 1 5 2 0 1 6 2 0 1 7 2 0 1 8 2 0 1 9 2 0 2 0 E产能/GW 大尺寸、大规模Large size, large scale 28LONGi Confidential 小结Summary M6/18X是在现有制造产线上的最优升级和利用材料端M6/18X硅片可以保证充分供应与其他尺寸相比，M6/18X在系统端占有突出成本优势M6/18X硅片具有优异品质，可以保证较高的电池效率推动M6/18X标准的建立，有利于降低整个产业链成本隆基持续降本、增效，硅片技术革命助力平价上网 29LONGi Confidential 隆基与您同行善用太阳光芒创造绿能世界 Utilizing solar energy, Building a green world