分析晶体硅太阳电池前电极形成机理-solarbe文库

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鍒嗘瀽鏅浣撶澶槼鐢垫睜鍓嶇數鏋佸舰鎴愭満鐞� � �txt閫嗛鐨勬柟鍚戯紝鏇撮€傚悎椋炵繑銆傛垜�涓嶆€曚竾浜洪樆鎸★紝鍙 €曡嚜宸辨姇闄嶃€備綘鍙戞€掍竴鍒嗛挓锛屼究澶卞幓 60鍒嗛挓鐨勫垢绂忋€傚繖纰屾槸涓€绉嶅垢绂忥紝璁╂垜浠病鏃堕棿浣撲細鐥涜嫤 ;濂旀尝鏄竴绉嶅揩涔愶紝璁╂垜浠湡瀹炲湴鎰熷彈鐢熸椿;鐤叉儷鏄竴绉嶄韩鍙楋紝璁╂垜浠棤鏆囩┖铏氥€傜敓娲诲  ““ 鏄�竴鍙锛鍚鏄浜竴鍙銆  鐢叉鍙  pdf 鍙  AP 屼¡浣¢€傚£璁 ⁄¥ƒ§閫currency1   TXT锛屾“涓«‹›愭浠fifl 満 –†銆 8 ‡愭· ¶ ‚„”» 銆€�2009 �7 � 涓 ‰� �23 ¿ 7 � 涓澶 у澶槼´ˆ˜¯˘˙¨  ,˚¸ ›˝˛ˇ ˘˙ 涓  , 510006National Engineering Research Center for Renewable Energy Center of So ut hChina , Instit ute for Solar Energy Systems , Sun Yat2sen U niversity , Guangzhou 5100060銆€ 鍓 1975 Æ 鍒ª 鐢 Ł澶槼鐢垫睜鍒fi 鍓銆 Ø數鏋Œ   1 ] 銆傜º鍓嶅 85 浠鐨勬浣撶澶槼鐢垫睜 æ槸囩涓 Æ 鍒ª � � 2 ] ,閫ı 涓 łøœ璁ß � �Ag 嗘· ø お闃崇數姹犲墠琛ㄩ潰姘寲纭呭噺鍙嶅皠鑶滀  , 鍐嶇粡杩囬珮娓╃儳˜撳˛ 哄舰鎴�Ag2 Si 鎺ヨЕ鐢垫瀬銆傜儳˜撳˛ 虹殑涓昏鍔熻鏄� �Ag 嗘·›惰В SiN x 鍙嶅皠鑶� �,褰㈡垚 Ag2Si 鐢垫瀬鎺ヨЕ ; H 鍘熷瓙鐢辫〃灞傚悜鍐呴儴鎵╂暎 , 閽鍖栦�鍐呮潅拰缂洪櫡 ; 褰㈡垚 Al2Si 鍚堥噾岃〃闈㈠満銆傛湰瀹為獙涓昏瑰湪楂樻俯鐑� х粨‡′欢涓�Ag2Si 鎺ヨЕ鐨勫舰鎴愭満鐞嗗強鐢垫祦¥犺緭鍒惰繘琛屼簡鍒嗘瀽銆� �Ag 嗘·涓昏�鍖呭惈肩數‡愭· 銆鐜荤拑 � � Glass f rit 銆 currency1満绮渭鍚堝墏銆 currency1満›fi墏 � � � , 鍏肩數‡愭·涓昏鏄� �0. 1 m 鑷冲崄犲井绫崇殑閾堕绮� �, 犳祮欐€昏川忕殑 60 锝�80 , 鐜荤拑欎富瑕佹槸姘у寲鐗� PbO 銆 �O3 銆�2 銆�3 銆� 绮currency1湯 , 犳祮欐€昏川忕殑 5 锝�B SiO BiO ZnO [2 - 4] 10 銆鍒扮º鍓嶄姝� �, 逛 Æ 鍒峰墠鐢垫瀬鐨勭儳˜撳˛ 烘満鐞嗚繕瀛ƒ湪璁稿浜夎 � ,浣嗘槸 ¡褰卞搷鍏fi湪鍟嗕笟鍖栧お闃崇數姹犵敓浜т 鐨勫 „ � [ 4 ] 銆傜儳˜撳˛ 鐢垫瀬纭涔棿褰㈡垚鐨勬嗘  � 閫ı 浣 €  ,鐢�,1956 敓 , 鐢熷  , 欐銆€E2mail shenhui1956163. co m3 ˚¸ 863 璁洪噾 º 2006AA05Z409 ; €璁 º � 2007A010700002‡ � 鐢�,1981 敓 ,纭 ‚„”鐢�,涓昏浠¡¢鏅纭呭お闃崇數姹犵˘˙fi˛浣�銆€� Tel 020239332864 銆€E2mail lijunyong gmail. com 銆€ £�f ro nt contact s and t he fo rmation mechanisms of Ag2Si contact s are investigated. Fo ur types of interface st ruct ures of nisms are co ncluded to be two2step and multi2step t unneling p rocess f ro m emitter to t he silver t hrough glass layers. Key words 銆€銆€ solar cell , f ront co ntact , sinter , Ag2Si co ntact sanisms of Ag2Si contact s and t he current t ranspo rt mechanisms are still not well understood. The sintering p rocess of鎺ヨЕ褰㈡垚虹⁄浠¥強鐢垫祦¥犺緭哄 , 瑰墠鐢垫瀬鐑х粨宸ヨƒ浠¥強 Ag2Si 鎺ヨЕ鐨勫舰鎴愭満鐞嗚繘琛屼簡鍒嗘瀽 ,§˝currency1浜�4 绉�Ag2Si “潰鐨勬 «舰‹ 銆傛›fifl¡鍚Ø殑 �“潰鎺ヨЕ褰㈠ ,鎸–currency1涓† ‡ ч· 堝 ¶ 姝‚„”» „數 ‰ ”満鍒¨槸 €涓昏鐨� �勭數 ‰ ”柟 ‹忋€�澶槼鐢垫睜銆€ 鍓嶇數鏋銆€ 鐑 х粨銆€ 2Si 鎺ヨЕ Ag 鍏 ¿ 銆€銆€�Ag2Si contact s are p resented. According to different types of interface struct ures , t he main current t ransport mecha2screen p rinting technique to form t he silver f ro nt contact s and aluminium rear contact s. However , t he fo rmation mech2´ 銆€銆€ ˆ˜墠傚満涓� �85 浠鐨勬浣撶澶槼鐢垫睜囩涓 ł øœ € ¯�澶–墠銆 Ø數鏋銆備浜嗕簡 ˘墠鐢垫瀬鐨� � �Ag2SiAnalysis of the Formation Mechanisms of Front Contacts of Crystalline Si Solar CellsL I J unyo ng , L IAN G Zo ngcun , ZHAO Ruqiang , J IN J ingsheng , S H EN HuiAbstract 銆€銆€ p resent , mo re t han 85 of t he crystalline Si solar cells in t he world market are p roduced using At鏅纭呭お闃崇數姹犲墠鐢垫瀬褰㈡垚虹⁄鍒嗘瀽 3‡ �,˙佸¨瀛�, 垫˚‹�, ¸ �,£ 銆€ � �1銆€ 瀹為獙�,鍏¨˝ 鐨勫˛ ˇ 鐑� х粨ø€¶俯銆傜儳˜撳 ¶俯浣� �, 鍒欐闈數鏋¡´ 閫�SiN x 鑶�, 涓鐢樆杩– ,琛ㄩ潰 H 鍘瀛愭浣撳鐨勬 Æ¡�澶�, 涓 currency1»閽寲浣撳缂洪櫡 ; ªØ儳˜ ø€¶俯楂� �,Ag 鐢垫瀬¥ 閫�n 灞傚勫 , 涓�p Ł 琛Ø 鎺ヨ� Е ,褰㈡垚Œº 烘粨  , 浣殑惰鐢樆岃澶х殑鍙嶅悜 æ忕數 �,闄嶄澶槼鐢垫睜 ı 銆  囩鐢樆鐜 1 锝�3ł 銆�00 ] 鍚ø殑 œ 纭鍒fi 澶� �cm [ 闃崇數姹銆傚お�闃崇數姹犵殑鐢ß 宸ヨƒ涓� 鍘昏〃闈㈡ ¥ 鍙婂澶囪〃闈 Æ瓧濉„粧闈� �; 娑叉€�POCl 3 鎵╂暎褰㈡垚 n 灞�, 瑰潡鐢樆涓�45 锝� 55ł/ sq ; 绛夌瀛愪鍒昏殌紭 � n 灞�;鍘婚櫎纾¿ 鐜荤拑 � ; PECVD 闀€ SiN x 忓弽勮啘 ,绾�75nm 鍘�; 鍒嗗埆囩涓 ł øœ宸ヨƒ鍒fi 鐢垫瀬銆岃〃闈㈠満 � � � �Ag 姝ｇ數鏋�,Ag 嗘· 囩鍟嗙 Ferro332 Al 462 祮 �; 閾ß 鐑х粨鐐竴儳˜�, €楂樻俯瀹氫  880 鈩冦€ «瘯 � I2V 鐗规€ 銆囩 � � Quanta 400 F E G 哄勬壂§忕數瀛愭樉寰暅  SEM � �Si2Ag 鐢垫瀬潰  ,堕噰鐢�EDS Energy disper sive spect rom2 eter ,介噺叉暎璋变华鍒嗘瀽鍏¨垚鍒銆� �鏅纭呭お闃崇數姹犲墠鐢垫瀬褰㈡垚虹⁄鍒嗘瀽/ ‡ 囩瓑9 浘 1 涓偣  3 浣嶇疆 ,鐑х粨瀹Ø殑 Ag 鐢垫瀬 ¶惈夎澶殑 Si , 存槑鐜鐠 � � ��SiN x 鑵铓€ 浣鐢銆� � � � �G. Schubert 绛塠 8 ] 閫杩� �SEM/ EDS 鍒嗘瀽涔熷鐜�, 鐑х粨鍚幓鐠冩·涓湁  Pb £currency1穩浜х敓銆�B. Sopori 绛塠 4 ] 璁や , 娓╃儤叉椂 ,嗘·涓�Ag 棰楃矑琚皬鐗鐘剁幓鐠冩·棰楃矑鍒嗙  ,ª¶湪 450 鈩�,鐜荤拑欏紑 Ł啍鍖栧苟瑕嗙洊鏃� �Ag 棰楃矑琛ㄩ潰 , �600 鈩�,Ag 棰楃矑琚啍铻嶇殑鐜荤拑欐鍖呭洿銆鏃 ‡忕潃娓╁害鐨勫崌楂�, 褰�Ag 棰楃矑鍒嗗竷浜啍铻嶇殑鐜荤拑欎鏃�, Ag 棰楃矑琛ㄩ潰涓幓鐠冩·鍙ø敓绂诲瓙浜† , fi湪 Ag 棰楃矑琛ㄩ潰褰㈡垚涓€ 灞�Ag2M2Si 娑叉€ 浉 M 涓虹幓鐠冩·涓殑 Æ睘鍏冪礌 銆傚鐜荤拑鐔旈€� �SiN x 灞傚悗 ,‹€ 嬩纭�n 鍙Æ皠鍖哄鎺ヨЕ ,剁户˜ 鐢熸哀鍖杩ƒ師鍙嶅  ‹� 1 銆傜敓鎴愮殑 SiO2 ›惰В浜幓鐠冩·涓�,Ag 棰楃矑 “潰澶勮仛闆� �, 杩滅 �Si 琛ㄩ潰鐨�Ag 棰楃矑涔¯浉浜掕仛闆嗘 «湪涓€ 銆�傚 ˚� �1 鎵€绀�,鐑х粨鍚�,Ag 棰楃矑闂村苟涓嶆槸褰㈡垚闈炲父绱у瘑鐨 ˜”瀯 � ,ª屾槸澶瓟˜”瀯 ,鍙互鍒†柇瀹為檯褰㈡垚  Ag2Si 鎺ヨЕ鐨�Ag 鎴鍒嗗苟涓嶆槸 � Ag 棰楃矑 ,ª屾槸閫ı 绂诲瓙浜† ›惰В浜幓鐠冩·涓殑  Ag 鍘熷瓙銆傚 ˚� �1 涓偣  1 銆�4 鎵€绀�, ㄧ晫闈㈠瀛ƒ�湪 Ag 銆銆� �, 鍙鐐� �Pb Si 幓鐠冩·涓鐗– 鐢ß簡鍙嶅 � , Ag ㄨ澶勬矇娣€ 銆傜幓鐠冩·杩ƒ彲浠綔涓竴闃绘尅灞傛潵忓皯 Ag 鎵╂暎杩涘叆 n 鍙Æ皠鍖哄拰 p2n ˜ 鍖篬 �9 ] ,浠庤€ 鍔浜 ˜ 鍖鏃 ˜ 鍚 æ 鐢銆傛湁 ‚ ˙ 璁涓篬 � � � � � � � � � � � � � � � � � � 10 ] ,濡傛灉£℃湁鐜荤拑欎粙浜�Ag 棰楃矑涓涔棿 � , ㄧ儳˜撹 ˇ 渭涓� �,Ag 鍘熷瓙鍙互鎵╂暎鑷崇 � 5 m 娣卞銆鐑� � х粨ø€¶俯鍚庤繘琛¶揩閫熷喎 �,Ag 鐢垫瀬涓�Si 涔闂磋褰㈡垚澶 “潰鎺ヨ� � Е褰㈠銆傜幓鐠冩·涓殑纭呭湪纭涓婂寤嶇粨鏅  ,ª�Ag 鏅剁矑ㄧ鐗囪〃闈鏋˝currency1涓旈殢鎰忓銆傚湪閫傚鐨勭儳˜”俯 Æ笅 � � � ,Ag 鏅剁矑鐨勭粨鏅剁敓闀 Si 澶栧欢瑰悜涓€鑷碵 11 ,12 ] 銆夌˘˙惰€呴€ı � T EM 鍒嗘瀽[ 13 ,14 ] 鍙ø , 噾瀛˝ 褰鐨� �Ag 鏅绮敓闀繘鍏¥fl � n 鍙Æ皠鍖哄 �, 鍙湁犵绫冲 �, ª屾湁浜鍒欐湁犵绾崇澶� у皬 , 涓繖绫绘矇娣€ ㄧ晫闈㈠鍒嗗竷£℃�湁勫 , 涓€ 涓哄€ 噾瀛琛ㄩ潰灞 Ł {111} 鏅堕潰銆傚闄 ,Ag 鏅剁矑杩涘叆鍙Æ皠鏋佸苟涓嶆槸ˆ存涓�Si 鎺ヨЕ[ 15 ] , �Ag 涓�Si 涔棿杩ƒ ㄧ害 5nm 鐨勭幓鐠冩·灞銆傚浘 � 1 涓偣  2 浣嶇疆涓昏鏄� �Ag �Si 鍏冪礌銆ㄨ鐐瑰槸 � �Ag ˆ 矇娣€ 銆 g £currency1穩鍙互杩涘叆  n 鍖哄ㄨ 130nm[ 12 ] 銆鐢变Ł 栧§鏄啍铻嶇幓鐠冩·�涓 �n 鍙Æ皠鍖烘 �, ›惰В ㄧ幓鐠冩·涓殑  Ag ¥ 湪纭〃闈㈡瀽虹粨鏅¨“杩涘叆 n 鍙Æ皠鍖虹粨鏅�, ˚ 姝浜舰鎴愮殑 “潰瀛ƒ湪浠笅犵褰㈠ � � 1 澶�Ag 棰楃矑/ 勫鐜荤拑 � 0 锝�20nm / Ag 鏅剁矑/ 勫鐜荤拑 � 5nm 宸« / Si ; 2 澶�Ag 棰楃矑/ ›惰В浜�Ag 鍘熷瓙鐨勫鐜荤拑欏 / Si ; 3 澶�Ag 棰楃矑/›惰В浜�Ag 鍘熷瓙鐨勫鐜荤拑欏 / Ag 鏅剁矑/ 勫鐜荤拑 �Si ,ª¶湪姝鎺ヨЕ褰㈠涓�,鍘殑鐜荤拑欏涓湪闈犺  Si 鍙Æ皠鏋殑涓€ т細瀛ƒ湪涓€浜棤 Ag 绮¡瓙鐨勫� 姝˘父鐑х粨¢呭£涓⁄皬浜�20nm [ 15 ] ,杩欎富瑕佹槸鐢变Ł 喎磋 ˇ嬩 ,Ag 绮¡瓙杩囬¥ 屾瀽哄苟 �Si 琛ㄩ潰嶆ƒ˜” 鐢§currency1 , 娑 €“簡鐜荤拑欎鐨�Ag 绮¡瓙 ; 4 夌˘˙惰€ 繕鍙ø [ 15 ] , «Ł‹鐨�SiN x 鑶滀›¥ currency1鐜ø湪愪鍖 � �,鐗瑰埆鏄湪 œ 纭呴噾瀛 ˜ 潰˜”瀯鐨勫  , 鐑х粨娓╁害fifl , «Ł‹鐨�SiN x 鑶澶�,浠庤€“樆姝簡鐜荤拑欎鐨� �Ag 鍚ø 涓–粨鏅鐢§currency1 銆備¡鍚Ø晫闈殑鎺ヨ� � Е褰㈠佸浘 2 銆浠¡互涓婂鏋˝彲†� �,鐜荤拑欎鐨勬哀鍖º 涓�Si 琛ㄩ潰鍙ø敓姘у寲杩ƒ師鍙嶅鐢熸垚 Pb ,Pb ›惰В浜幓鐠冩·涓�, 瑰舰鎴愭嗘 ‡鍒 2銆€ ˜”灉鍙婂鏋�數姹犳·鎸囩數鏋佸拰涓绘·绾柇闈¶繘琛�SEM 鍒嗘瀽 , 鍏剁粨鏋濡傚浘 � 1 鎵€绀銆傚� Ag2Si “潰涓嶅浣嶇疆杩涜 �EDS 鍒嗘瀽 ,鍏fi‚鍏绱犲惈忓湪琛� �1 涓 „” 銆琛  1 銆€EDS 鍒嗘瀽˚�1 涓 ‚鐐规垚鍒嗗惈 »„” ˚  1 a 鐐鐐� �Table 1 銆€EDS analysis result s of t he point s in Fig. 1鎴˝ Si 鍘熷瓙鍒嗘 Ag Pb鐐�鐐�˚�1 b 鐐�12. 71 52. 56 0. 79 33. 9442. 29 10. 59 2. 30 44. 8250. 83 0. 52 07. 85 023. 58 7. 96 0. 6942. 33 49. 82鍏fi‰48. 6567. 77¿ 瀹€ 琛ㄧ´ «瘯杩囩ˆ涓˜currency1鐜扮殑 � � C 銆绛currency1垚鍒� �O2. 1 銆€ 鐑х粨宸ヨƒ« 銆傜儳˜撶¯浣˘俯娓╁害涓€ Ø湪 � 400 鈩浠¥ � , 涓俯娓╁害涓  300 锝�700 鈩楂�樻俯娓╁害涓�700锝�00 鈩冦€傚湪浣˘俯闃¨ , 嗘·涓殑 currency1満 ›fi墏屾湁虹˙鍚堝墏琚¨鍙戞“琚 ˚鐑  ; 娓¸ «�, 鐜荤拑欏紑 Ł啍鍖�,Ag 棰楃矑‹€ «仛鍚�; ㄩ珮娓¸ «�,Ag 銆鍙˝幓鐠冩·鎴˝ � Si 鍙ø敓鍙嶅 , 褰㈡垚 Ag2Si 鎺ヨЕ ; 鍐峰˛鏃�, Ag 绮¡瓙ㄧ鐗囪〃闈粨鏅剁敓闀銆ˇ珮娓¸鍔ㄨ〃闈� � �H 鍘熷瓙鍚ø 鐗– 銆傚闄呭湪� �纭鐗鍙ø敓鐨勫弽旀俯浣¡Ł鐑� х粨鐐夎瀹殑娓╁害  , Kyunghae [5] Kim 绛 ‚„”�鍙ø ,Ag 涓�Si 鐨勫闄呮˝浣冲弽旀俯 Æ 605 鈩杩滀浜� �Ag2Si 鍏辨鐐殑娓╁害 835 鈩杩欏彲æ槸鐢变Ł鍙嶅浣撶ˆ 涓˜惈 ˆ 垚鍒� � � Ag 銆銆銆绛 ª屼鍚堥噾� � � �鐔„偣闄嶄銆傚姝�Si Pb Bi €瑕鍚 € n 灞傜殑鎵╂暎撳害銆嗘·鎴˝ �銆忓弽勮啘鍘害绛稿 ˚犵礌‡ヨ瀹儳˜撶¯鍚勬俯鍖哄闄殑娓╁害銆鑵殌˙ €� � � ��SiN x 鑶�, 浣�Ag 棰楃矑¸ 涓鍙Æ皠鍖哄鐢¯數瀛 � � � 6 ] 銆傚湪稿 Ø˚鐑уcurrency1満›fi墏鐗川涔⁄悗 , 鐜荤拑欏紑 Ł啍鍖 € 娑Æ寲屾 ª� �SiN x 琛ㄩ潰 ,˜ц€屾 �Ag 棰楃矑岃铓€鎺�SiN x 灞銆傜幓鐠冩·鑵殌 � SiN x 灞 ˇ⁄ 鐢¯殑姘у寲杩ƒ師鍙嶅涓篬 7 ] 銆€銆€銆€銆€x Si 2MO x ,glass x SiO2 2M ‹ M 涓虹幓鐠冩·涓殑 Æ睘鍏冪礌  ,涓昏鏄� �Pb 銆� 12. 2 銆€ 2Si 鎺ヨЕ鐨勫舰鎴愭満鐞�Ag˚ 銆€ 鐢垫睜Ł呮Ø鐢垫瀬� a 屼富Ł 數鏋 �b 鍓Œ潰鐨�SEM ˚ßº Fig. 1 銆€ SEMcross2section image of Ag gridline a andAg busbar bŁ– 鐑х粨宸ヨƒ €瑕粡杩娓銆涓俯銆楂樻俯銆鍐峰˛ � � � � 4 涓 鐜荤拑欏湪 Ag2Si 鎺ヨЕ褰㈡垚杩囩ˆ涓鎸簡鍏 ¿鐨綔鐢  , 瀹�10 ‡愭· ¶ ‚„”» 銆€�2009 �7 � 涓 ‰� �23 ¿ 7 �涓€瀹殑浣滅 [ 16 ] 銆備 �Ag 鐨勭粨鏅剁敓闀熷ヨ繕 �Pb 绮¡瓙鐨勭粨鏅剁敓闀�,濡傚浘 1 b 涓偣  1 鎵€绀銆 � b 鐨勬矇娣€ 虹⁄ ¡娓 æ� �,ˆ 墠杩樻病夌浉鍏 „ 銆� �2. 3 銆€ 鐢垫祦¥犺緭哄 ˆ 墠  , 逛 Æ 鍒�Ag 鐢垫瀬鐨勭數 ‰ ”満鍒惰繕£℃湁寰 fl 寰堝鐨勮В �, ㄧ晫闈㈠瀛ƒ湪澶鎺ヨ� � Е褰㈠濡備闈㈡鍒嗘瀽鐨�4 绉嶆 «舰‹� 銆傛 ¯˘˙惰€17 ] 璁や鐢垫祦¥犺緭鏄粡杩囩洿鎺–殑  Ag2Si 鎺ヨЕª¶ 鐢¯殑 , 浣嗘槸閫ı 鍒嗘瀽鐑х粨杩囩ˆ涓幓鐠冩·鐨勬祦鍔 € у強鍏¨ �Ag ㄧ幓鐠冩·涓瀽虹殑˜” 璁や  , 鐜荤拑欏瀛ƒ湪浜¡ı浣殑 � Ag2Si 鎺ヨЕ涔棿 , ˚犳涓嶅ㄧ洿鎺–殑  Ag2Si 鎺銆傜� �幓鐠冩·涓€ 璁や鏄 ˜ 缂浣  , 鍏鐢闃荤楂 � � � �109ł cm[ 12 ] 銆傜浜幓鐠冩·涓 ł簡  Ag 绮¡瓙 ,ˆ 墠鏅 ø璁閫ı ‡ „”» 旀潵¥犺緭鐢垫祦  [ 6 ,12 ,18] 銆�Ching2 His Lin 绛塠 15 ] 璁や峰œ瀹氫綔鐢ㄧ殑鏄 €ı  Ag 鏅剁矑2 勭幓鐠冩·灞�Si “潰鐨勭數 ‰ 銆傜浜˘ß绉嶆 «舰‹忕殑鐜荤拑欏闈炲父 � � Ł 5nm , 涓浠垚涓虹數 ‰ 撶殑闃绘尅灞�, 鐢瀛˝彲鐢 ‚„”» 旈€ı 銆 € �‰ 竴绉嶆 «舰‹  , 鐢变Ł n 鍙Æ皠鍖哄銆鏅剁矑銆棰楃矑涔棿 æ槸ˆ 勭殑鐜� �荤拑欏鍙涓  Ag Ag 鐢垫祦鏄 €ı 涓† ‡  ч· 堝 ¥犺緭鐨銆 €¶ 浜浜銆涓� � �夌鎺ヨ� Е褰 ‹� �,鍘殑鐜荤拑欎 ›惰В鐨勯噾灞炵矑瀛愪鐢垫祦鐨 ‰ 撹‡涓粙浣鐢  ,澶氭 ‡ ч· 堝閫ı Æ睘绮¡瓙鍒 Ag 棰楃矑灞傚鐜扮數 ‰ 銆傜幓鐠冩·灞傜殑鍘 �害ˆ存褰卞搷鐫€澶槼鐢垫睜涓鐢樆鐨勫廩  19 ] , 鍘殑鐜荤拑欏楂樼殑鎺ヨЕ鐢樆 , 闃荤鐢垫祦鐨 ‰ 銆鐢垫祦¥犺緭鐨勬満鍒惰 ˚� � � � �3 銆�Fig. 3 銆€ Schematic diagram of current transport mechanisms[ 15 ]夌˘˙ 璁や杩ƒ 竴鐑縺鍙ø數瀛愮殑鐢垫祦¥犺緭鍒銆傚 ‡� � � ч·鐢垫祦犱富湴浣嶆椂 , 鎺ヨЕ鐢樆鍙互寰堝皬  , 鍙互鐢 ˚�2 銆€ 2Si “潰鐨勬 «舰‹�Ag Fig. 2 銆€ Schematic diagram of Ag2Si contact structure ˚�3 銆€ 2Si “潰鐢垫祦¥犺緭鐨勬満鍒�Agthrough Ag2Si contact浣滄嗘  20 ] 銆傚摢绉嶄‰ ”柟‹忓崰涓诲 ˇ綅鐑 х粨宸ヨƒª 瀹� �,涓嶅鐨勭儳˜撳˛ 哄褰㈡垚涓嶅鐨  Ag2Si 鎺ヨЕ “潰褰㈠緢澶х殑褰卞搷銆備竴潵  ,楂樻俯涓鐑� ¢呭£涓�, 涓† ‡ ч· 堝犲 � �,鎺ヨЕ鐢樆浣�; 娓╁害ˇ嶄 ¢呭£涓�, 澶氭 ‡ ч· 堝犲 � �,鎺ヨЕ鐢樆¥ ◢楂樹銆�3銆€ ˜撹¶ 鏋愪簡涓 ł øœ  Ag 鐢垫瀬鐑х粨宸ヨƒ涓�Ag2Si 鎺ヨЕ 鐨勫舰鎴愭満鐞銆傜幓�鐠冩· ㄧ數鏋佸舰鎴 ˇ嬩鍙戞尌浜嗗叧閿綔鐢銆澶 ч噺鐨�Ag 绮¡瓙›惰В浜幓鐠冩·涔嬩 , 鍐峰˛杩囩ˆ涓�, 杩囬¥ Ø殑 Ag 绮¡瓙鏋˝currency1剁粨鏅剁敓闀�, �Si 琛ㄩ潰褰㈡垚噾瀛鐘剁殑 � Ag 鏅剁矑銆 Ag 鏅剁矑鍙繘鍏  Si 鍙Æ皠鏋佽 130nm 銆 Æ �4 绉嶇�2鐢垫瀬鎺ヨЕ褰㈠銆傜數殑¥犺緭哄鏅 ø琚¨涓烘槸浠‚„ 堝瑰 ¥犺緭 銆傛›fi�Ag 棰楃矑銆鏅剁矑銆涓夎€ 箣闂幓鐠冩· � � Ag Si 鍘害鐨 ¡鍚�,鐢垫祦¥犺緭瑰鍙堝涓袱姝‚„”» 旀柟‹忓拰澶氭 ‡ ч· 堝瑰銆�鍙 €冩鐚�1 銆€Ralp h E L . 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Thailand Bangkok ,2004 443銆婃潗欏ャ€ 鍒涘垔浜  1987 �,鏄牳冩湡鍒  ,涓浗绉戞璁烘 ˜熻 ›愭 湡鍒� 绉戞 Ł稿熷垔 , 涓浗绉Æ ‹œ 版嵁 ”潵›愭湡鍒   CN KI 熷垔鍏版嵁 ”敹褰œ湡鍒銆绉Æ € 殑椋為€熷灞曚 ‚„”鎴愭灉浜� � уcurrency1鐨勫懆 ¯缉†�, 瑰揩閫熷強鏃fi 冪瀛︾˘˙¨ƒ鎴愭灉鐨勯˝姹備›鏃–泭澧炲己銆備浣跨 €宸綔ª 鍙婂曚� � �綅㈠§鑾峰緱绉戞鎴愭灉鐨勯鍙戞潈 Ø煡嗕 ‡� �, 垔嗙璁句竴涓 ƒŁ忕º 斺€  斺€滅˘˙剁畝モ€ 銆傛ßŁ忕º浠¥垱版€� у拰 €熷冪˘˙ 鎴愭灉涓虹  ,涓昏寰侀�泦瀛湳”у己銆鍏ª湁鍒 ƒ”濇兂鐨勭˘˙¨„� �,浠杩垚鏋滄帹拰瀛湳浜†祦銆�5 囩呴』˜忚笀岃棰樼粍鐨弗Ł 璁哄拰瀹℃煡 � , 淇濊瘉囩鐨勮川忓�拰鍘熷垱”�, 浣 € 富瑕侀拡瑰崥澹銆欐鍙˝˘˙fi憳銆 ˇ 欢涓˝ 夌涓€浣� � � �€ 畝浠銆� �mail 銆銆� �E 鐢佃瘽閫ı ø潃绛  ,浠究鑱„ˆ 銆� 6 ‚„” 鹃呴』�涓哄浗瀹¨“ 侀儴绾у熀戣祫鍔¸」ˆ 銆� � 7 ‡– 涓€寰嬩¡閫€ � , 疯嚜欏 ˇ 銆� �ˆ € 鏃fi皢ˇ 欢鐨勭數瀛愮増鍙戦€佽  mat2rev 163. co m 銆�, 2 涓€˜�忛噰鐢皢 �3 涓湀鍐呭畨鎺¡ 琛銆  3 濡傛湁涓€ˇ 銆鍓´獌鎴栨妱琚 涓鸿€� � � � �,涓€鍒–悗鏋滅浣 €呮湰浜鸿礋銆� �12 Ballif C , Huljic D M , Willeke G , et al. Silver t hick2film Lett ,2003 ,82 12 1878 izatio n of Ag p recipitates in screen p rinted Ag co ntact s fo r Si 14 Ballif C , Huljic D M , Hessler2Wysser A , et al. 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