SERIS-Rolf STANGL-solarbe文库

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1SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Double-sided passivated contacts for n-type mono-silicon solar cells with large-area cell efficiency potential 23 Rolf STANGL, Puqun WANG, Ranjani SRIDHARAN, Zheng XIN, Zhi Peng LING* Solar Energy Research Institute of Singapore SERIS *now at REC Solar, Singapore SNEC conference, Shanghai, China 3-6th June, 2019 2SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Front PECVD passivation/ARC stack Screen-printed and fired front metal contact Diffused emitter Screen-printed and fired rear metal contact Rear PECVD passivation npoly-Si Interfacial oxide SERIS’ monoPolyTM cells Rear-side npoly-Si deposition Voc mV Jsc mA/cm2 FF Efficiency PECVD SERIS Meyer Burger 697 41.4 81.3 23.5 LPCVD SERIS 681 39.9 81.2 22.2 Main loss front contact recombination monoPoly ➔ biPoly J0,cont-front 750 fA cm-2 J0,pass-front 31 fA cm-2 J0,cont-rear 250 fA cm-2 J0,pass-rear 5.2 fA cm-2 96 4 96 4 Σ 60 fA cm-2front Σ 15 fA cm-2rear 3SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Outline ❑ Vision Double-sided contact passivated solar cells Moving from SERIS’ monoPolyTM to biPolyTM ❑ Requirements/Challenges for biPolyTM cells ➢ Ultra-thin front-side poly-Si layers ➢ Suited metallization for those layers ❑ Development of ultra-thin contact passivation layers ➢ Etch-back ➢ Process re-optimization for ultra-thin layers ❑ Metallization schemes for ultra-thin contact passivation layers ➢ Screen printing on TCO ➢ Inline plating ❑ Efficiency potential for biPoly using our current LPCVD layers ❑ Summary Conclusion 4SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Motivation The beauty of contact passivation Measured PL image Conventional rear-contact Contact passivated rear-contact n-diffused Si SiOx tunnel layer TLn-poly Si capping layer CL 5SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Motivation cont’d Simulated parasitic absorption in LPCVD poly-Si layers Vary poly-Si thickness SiOx TLp -poly-Si CL SiOx TLn-poly-Si CL Vary front ❑ poly-Si thickness reduction 250 nm ➔ 10 nm ❑ Current loss parasitic abs. - rear-side 0.4 mA cm-2 max - front-side old LPCVD nk-data 10nm LPCVD 2 mA/cm2 10nm PECVD a bit less Vary rear SunSolveTM simulations in air 0.4 ➔ ultra-thin front poly-Si required 6SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. ❑ Processing of ultra-thin 100nm n-poly-Si Contacting “thin” 50nm poly-Si punch through punch through SEM picture 10SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Metallization schemes for thin poly-Si ❑ It is possible to contact poly-Si layers by means of TCO without significant loss in lifetime ❑ These TCO layers can be subsequently low-T screen printed Screen printing, contacting TCO on top of ultra-thin poly-Si layers 11SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Metallization schemes for thin poly-Si ❑ Minor iVoc to Voc loss after TCO deposition low-T screen printing ❑ Efficiency for 50 nm front-side LPCVD poly-Si 19.4 ❑ Device integration for 10 nm front-side poly-Si currently on-going mask removal issues encountered Screen printing, contacting TCO on top of ultra-thin poly-Si layers biPoly 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 25 30 35 40 current density j [ mA/cm 2 ] voltage [ V] 50 nm fro nt po ly -Si n 25 0 n m fro nt po ly -Si n 12SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Efficiency potential for biPolyTM cells Based on measured J0 and Rc values of our SiOx/LPCVD-poly-Si layers Calculated efficiency potential ultra-thin SiOx/poly-Si layers fix front-contact properties vary rear-contact j0,rear, Rc,rear 22.3 full-area rear-contact 23.2 localized rear-contact Corresponding studies for our SiOx/PECVD-monoPoly layers on-going 13SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Summary biPoly cells work ❑ Efficiency potential - Using our developed “ultra-thin” LPCVD contact passivation layers 10 nm front-side textured n-poly, 10 nm rear-side planar p-poly ➔ Efficiency potential of biPoly exceeds monoPoly by 1 absolute Challenges to be overcome ❑ biPoly cells require - ultra-thin front-side poly-Si layers 10nm - suited metallization schemes, contacting these layers ❑ Etch-back technology enables ultra-thin poly-Si layers 3 nm ❑ TCO layers on top of poly-Si promising metallization scheme ❑ Currently mask removal issues in case of ultra-thin layers 14SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Thank you for your attention rolf.stangl nus.edu.sg We are also on 15SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. Metallization schemes for thin poly-Si Inline plating 1 Using fs laser ablation to create damage-free contact openings 2 Ag inline plating to form front- contacts on-going fs laser Having to solve screen printing on p-poly-Si layers 16SERIS is a research institute at the National University of Singapore NUS. SERIS is supported by the National University ofSingapore NUS, National Research Foundation Singapore NRF and the Singapore Economic Development Board EDB. ❑ Rear-side poly-Si thickness reduction 250 nm ➔ 25 nm ❑ Maximum current gain 0.4 mA/cm2 Motivation cont’d Simulated parasitic absorption in rear-side LPCVD poly-Si Ellipsometry SunSolveTM simulations Vary rear poly-Si thickness