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EXCEEDING 23 CELL EFFICIENCY WITH MEYER BURGER SINGLE SIDE PASSIVATED CONTACT TECHNOLOGY SNEC 2019, June 4, 2019 Thomas Kluge1, Thomas Grosse1, Hans-Peter Sperlich1, Dirk Landgraf1, Sandrine Lauretta Fondop Makoudjou1, Marcel König1, Naomi Nandakumar2, Shubham Duttagupta2, John Woodrofee Rodriguez2, Rico Boehme1 1 Meyer Burger GmbH, An der Baumschule 6 – 8, 09337 Hohenstein-Ernstthal 2 Solar Energy Research Institute of Singapore © Meyer Burger GLOBAL TECHNOLOGY ROADMAP 2 ▪ p-PERC is mainstream „work horse“ ▪ CE improvement slowing for mass-produced PERC 0.10.3 per year ▪ n-type technology industrially ready ▪ n-TOPCon/monoPolyTM likely next evolutionary upgrade technology for existing PERC lines ▪ n-HJT likely to be green field technology-of- choice with higher CE and less complexity ▪ 3rd generation solar cell technologies like perovskite-on-Si in focus Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger HIGH EFFICIENCY CELL TECHNOLOGIES HJT AND TOPCON GAINING MOMENTUM 0 5 10 15 20 25 30 20222016 202120192015 2017 20202018 2023 CAGR 23GW Source PV InfoLink, Dec 2018 PERT HJT TOPCon IBC 3 Capacity forecast for n-type technologies Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger TOPCON SMART TOOLS AND LEAN PROCESS SEQUENCE TO INDUSTRIALIZE PASSIVATED CONTACT CELLS Meyer Burger booth N3 510 © Meyer Burger WHY MEYER BURGER PASSIVATED CONTACT TECHNOLOGY IS SO INTERESTING 5 ▪ Cell Efficiency 23.0, Module Power 340W* within one year ▪ TOPCon cell is bifacial ▪ With MB passivated contacts recombination loss at cell rear side J0 23.5 700mV Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger8 HOW TO MAKE 23.0 EFFICIENCY IN MASS PRODUCTION ▪ Standard tools from PERC line ✓ Texturing wet bench ✓ Annealing tube ✓ Passivation tools ✓ Printing line ▪ Modified tools from PERC line ✓ Boron Diffusion tube facility 30 capacity ✓ BSG removal SSE wet bench recipe ▪ Tools not needed for TOPCon line x Laser Tools SE and LCO x LID Curing ▪ New Tools for TOPCon Line ➢ CAiA ➢ Short Clean wet bench LEAN PROCESS SEQUENCE Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger HOW TO MAKE 23.0 EFFICIENCY IN MASS PRODUCTION 4 3 2 1 Optimized single side etching ▪ Complete cleaning of rear side from boron doped Si Excellent boron diffusion ▪ Boron diffusion 90 Ohm/sq., ▪ J0,e optimization Shunt and Irev2 Reduction 23.0 EFFICIENCY IN MASS PRODUCTION Meyer Burger , SNEC 2019, Shanghai, June 2019 Vrev2 -14V 1. Avoid wrap around of Boron Emitter ➔ Optimized post treatment Doped a-Si Layer ➔ Optimized PECVD plasma deposition process AlOx passivation ➔ MAiA/FABiA process 2. Avoid contamination and touching surface during wafer handling and transport FABiA 3in1 PECVD Front AlOx/SiNx and Rear SiNx made in one machine CAiA, 2in1 PECVD Oxide and doped poly-Si layer made in one machine 3. Development of metallization pastes for suitable contact formation at boron emitter and poly-Si layer. PROCESS ADJUSTMENT Irev2 Reduction FF 81.34 ETA 23.46 Voc 697.1mV Isc 10.11 A Champion Cell Op tim ize d Pr oce ss Meyer Burger booth N3 510 © Meyer Burger11 CAIA® PLATFORM FOR FULLY INTEGRATED TOPCON/MONOPOLY PROCESSES No wrap around All required layers are processed in one tool Very high quality interface oxide Doping possible for n- and p-type sequences Best in class total cost of ownership Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger12 FABIA® ONLY TOOL INTEGRATING ALL DIELECTRIC LAYER DEPOSITIONS IN ONE TOOL Based on MAiA® platform which is the market‘s leading PERC solution Ideal tool for PERC and complemented by CAiA® for manufacture of passivated contact cells Proprietary and patented process – freedom to operate at Meyer Burger‘s best ability OPEX savings 50 of local competition Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger SUMMARY Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger SUMMARY N-type technologies TOPCON and HJT opening larger potential for CE improvements and cost reduction Meyer Burger supports TOPCon technology stream with unique products CAiA® for TOPCON FABiA® for industry leading CE and module powers MB´s SWCT module 23.5 “Golden Cell“ efficiency and 23.1 “Golden Run“ efficiency 335W Module Power with SWCT 60 cells, Full Cell, M2, GB Irev2 and shunting ➢ Solved using most lean process sequence developed together with SERIS ➢ Combination of optimized diffusion, optimized SSE and CAiA ➢ No Wrap-around of doped a-Si during PECVD deposition because of optimized plasma deposition process Complemented equipment for TOPCon by Meyer Burger ➢ CAiA Lab tool, sold to first customers ➢ CAiA Production tool available end of 2019 ➢ FABiA 6.1 tool available NOW 14 Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger MERCI THANK YOU AND SEE YOU AT OUR BOOTH N3 510 Dr. Rico Boehme Head of Global Technical Sales Meyer Burger 49 174 3437284 Meyer Burger , SNEC 2019, Shanghai, June 2019 I thank all of Meyer Burger‘s customers for their trust RD team at Meyer Burger SERIS Meyer Burger booth N3 510