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SINGULUS TECHNOLOGIES AG May 20th, 2020 - 1 - confidential SUMMARY HETEROJUNCTION PROJECT GENERIS PVD 10000 / SILEX II CLEANTEX8000 June 28th, 2020 SINGULUS TECHNOLOGIES AG May 20th, 2020 - 2 - confidential SILICON HETEROJUNCTION SOLAR CELLS PVD EQUIPMENT „GENERIS PVD 10000“ PVD 产能 10000片每小时 2 GW 只要 4台节约员工人数。节约洁净厂房面积。节约自动化台数。节约厂务配管。实证效率高于 24 靶材利用率 83 -行业最高 SINGULUS TECHNOLOGIES AG May 20th, 2020 - 3 - confidential SILICON HETEROJUNCTION SOLAR CELLS Wet EQUIPMENT „SILEXII –CLEANTEX 8000“ 湿法设备产能 8000片每小时 2 GW 只要 5台节约员工人数。节约洁净厂房面积。节约厂务配管。实证效率高于 24 创新的纯臭氧工艺 -运行成本低纯水消耗一片 1升左右。 1台节约化学品 400万。 5台节约 2000万一年。 SINGULUS TECHNOLOGIES AG May 20th, 2020 - 4 - confidential SINGULUS TECHNOLOGIES AG Your Partner for Process Development and RD Capabilities Wet Processing Laboratory Capabilities Material characterization and chemical analysis  Offline Titration  Light microscope  Reflectivity measurement  Infrared camera  Sheet resistance measurement 4-point probe  Further measurement equipment available by HQ or 3rd party  Alkaline and acidic cleaning and etching  Ozone cleaning and etching  Rinse QDR and overflow  Drying N2 / CAD / Vacuum  Special Process Assembly possible PVC Laboratory Capabilities  DC sputtering with Planar Cathode  DC sputtering with Rotatable Cathode  pDC/BP Bipolar sputtering with Rotatable Cathodes  RF sputtering with Planar Cathode  Metallic and Reactive Mode  Substrate temperature up to 300 °C  Sputter gases Ar , O2, N2, Ar/H2 All components identical with mass production tool SINGULUS CAN OFFER JOINT RD, TESTING AND SAMPELING FOR PVD AND WET PROCESSING SINGULUS TECHNOLOGIES AG May 20th, 2020 - 5 - confidential SILICON HETEROJUNCTION SOLAR CELLS COMBINE „GENERIS PVD 10000“ SILEX II CLEANTEX 8000 SINGULUS IS VERY INTERESTED IN COMBINING ITS EQUIPMENT, TECHNOLOGY AND COMPETENCE IN HETEROJUNCTION TECHNOLOGY AT YOUR PROJECT SINGULUS TECHNOLOGIES AG May 20th, 2020 - 6 - confidential SILICON HETEROJUNCTION SOLAR CELLS COMBINE „GENERIS PVD 10000“ SILEX II CLEANTEX 8000 感谢您的关注 THANK YOU FOR YOUR ATTENTION

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