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HIT 澶 槼鑳界數姹犵殑鍙戝睍姒傚喌 * 鍙插皯椋�, 2 , 鍚寸埍姘�, 2, 3, 寮犲 瀹� , 2 , 濮�. 杈�, 4 1 澶ц繛鐞嗗伐澶у鏉愭枡绉戝 涓庡伐绋嬪 闄� 澶  ц繛116024; 2 澶ц繛鐞嗗伐澶у涓夋潫鏉愭枡鏀规€ф暀鑲查儴閲嶇偣瀹為獙瀹 澶� ц繛116024; 3 杈藉畞鐪佸お闃宠兘鍏変紡绯荤粺閲嶇偣瀹為獙瀹 澶� ц繛116024; 4 寰峰浗閿℃牴澶у鏉愭枡宸ョ▼瀛﹂櫌, 寰峰浗閿℃牴57056 鎽樿� 闃愯堪浜嗗紓璐ㄧ粨 HIT 澶 槼鑳界數姹犵殑缁撴瀯涓庣壒寰� 骞朵粠寮傝川缁撹兘甯︾粨鏋勭殑浼樺寲銆侀潪鏅剁 灞傜殑鍒跺 鏂规硶銆佽儗� �闈㈠満 BSF 鐨勭爺绌 €佽 鏂 殑 鍙戝 鏋 鏂 殑闈 夋 闈 H IT 澶 槼鑳界數姹犵殑 € 灞 € �  HIT ¡鐨¢£涓⁄寲 ¥ƒ§¥currency1 “ , 骞跺睍 « H IT 澶 槼鑳界數姹犵殑 ‹鍙戝睍›嬪 fi銆�鍏fl –�. H IT 澶 槼鑳界數姹� . 寮傝川缁†粨鏋�涓 ‡鍒· 鍙�  TM615 鏂¶‚„”§ �A Overview of the Development of HIT Solar Cells SHI Shaofei1, 2 , WU Aimin1, 2, 3 , ZHA NG Xueyu1, 2 , JIANG Xin1, 4 1 Schoo l of M aterials Science and Eng ineering , Dalian Univer sity o f Techno log y, Dalian 116024; 2 Key Laborat or y of Materia ls Modification, Dalian Univer sity o f Techno log y, Dalian 116024; 3Key Laborato ry of So lar Photov oltaic Systems, Liaoning Pr ovince, Da lian 116024; 4 Institut e o f Mater ials Engineering ,Sieg en Universit y, Siegen 57076, Germany Abstract The structur e and cha racteristics o f HIT so lar cells ar e intro duced and summarized the status o f technolog y development f rom the aspects below the o pt imization of hetero junction band str ucture, the preparat ion method of amor phous silicon lay er , the study o f the back surface field, t heselection of subst rate mat erial and the inno vatio ns o f emitter mater ial. At last the status of their indust rializatio n and pr ospects of the H IT solar cells have been rev iewed. Key words H IT, solar cells, hetero junctio n str uctur e * »‰宸ョ▼ € 浗瀹剁£閲嶇偣瀹為獙瀹 ¿閲�  9140C540105080C5402 ; 涓 ´ˆ˜¯˘绉˙爺涓⁄¨璐 ˚¸ ˝閲˛˝ˇ �DUT10JN08 鍙插皯椋 � � 1986 骞寸, 涓 寮傝川缁 お闃宠兘 ¡§¥currency1� � Email shao feishi 126. com 鍚寸埍姘 € � � 1973 骞寸, ⁄ , 暀 � 涓 � Æ澶 槼鑳界數姹犵爺绌�  . Email aimin dlut. edu. cn0 寮 ª鑳 満 ŁØŒº æ « ı鑳 鐨 łø爺绌�涓庡œ ß 鍙 €傚お闃宠兘鍏変紡鍙˙數 绉嶅埄 ß厜浼忔晥 斿皢澶槼鍏夎緪灏 兘鐩存帴杞 崲涓虹數鑳界殑鏂板瀷鍙˙數 € � 鍥犲叿 夎˝婧愬厖›炽€ 竻娲併€佸畨鍏ㄣ€佸 鍛介暱 変紭鐐� 琚涓¯槸 € 墠 ¥殑鍙啀 �鑳 € 箣涓€ , 宸叉垚涓哄彲 嶇鑳 € 腑鍙戝睍 €蹇€ 渶鍏锋椿ˇø殑§¥currency1 嗗煙銆傜洰 嶅浗闄呭厜浼忓競鍦轰笂鐨 お闃宠兘 ¡涓 � �鏅朵綋 鍖 嫭 櫠 呫€佸 鏅剁� � � 銆侀潪鏅 櫠寮傝川缁 � � HIT 銆侀潪鏅剁 Æ銆佺⒉鍖栭晧� CdT e Æ鍙婇摐閾熺� CIS Æ澶 槼 ¡夈€傚叾涓 晢鍝佸寲鐨勬櫠 †�澶 槼鑳界數姹犱粛 犱富娴� 鍏跺厜 佃浆鍖� 鏁堢巼宸茶揪25, 嗗彈鍒版 鏂 函 ﹀拰鍒跺 宸ヨ壓闄愬埗� , 寰堥毦 嶆彁樺叾杞 寲鏁堢巼鎴栭檷 庢垚 � 鑰岄潪鏅剁�澶 槼鑳界數姹犺櫧鐒惰兘澶  ч‰绉 浜� 犱环鍙堜綆寤� 嗗叾杞 崲鏁堢巼 嶆瘮杈冧綆  , 骞朵笖绋冲畾鎬�宸 €�涓轰 闄嶄綆鎴愭˘鍚屾椂淇濇寔樿浆 晥 戝 鏉� �IT ¡寰 浜 熺殑鍙戝睍銆傝 绉嶅紓璐ㄧ粨缁撴瀯鐨勭數姹 槸缁 涓 € 紭鐐 厖鍒嗗 暱澶勭殑 € 宠   °€ ˘鏂 缁嶄 HIT ¡鐨�缁撴瀯涓庣壒鐐 缁 堪浜 � IT ¡鐨 灞 骞跺 � HIT ¡鐨�‹ �浜嗗睍 €�1 H IT 澶 槼鑳界數姹犵殑缁撴瀯涓庣壒鐐�1. 1 H IT 澶 槼鑳界數姹犵殑缁撴瀯鍥 涓 � IT 澶 槼鑳界數姹犵殑˜¯˘鏋 €� 鍏剁壒寰 槸 厜  у х殑pi Si H ¡ ¡¢£� 5 10nm ⁄儗闈 ¥鐨ƒ� n Si H ¡ ¡¢£� 5 10nm 澶 §鏅朵綋 currency1 , 鍦“« х殑¸跺‹› 垚忔fi鐨勭數鏋佸拰fl·數鏋 鏋勬垚鍏锋 –†� О缁撴瀯鐨‡IT 澶 槼鑳界數姹·1, 2] 銆�鍥 � HIT 澶 槼鑳界數姹犵粨鏋勭 ¶忓‡Fig. 1 The structure schematic of HIT solar cell 130 鏉愭枡–‚A缁 堪„�. 2011 骞 涓 ”� � � �5 »7 �1. 2 HIT 澶 槼鑳界數姹犵殑†偣 1 庢‰宸ヨ壓HIT ¡缁 浜 ¡¢お闃宠兘 ¡ 庢‰ 900 ˘ ˙宸ヨ壓鏉ヨ¨寰�pn 缁 €傝 绉嶆˚ ¸ ˝˛ˇ 鑳  , 鑰笖 庢‰ �  a Si H ˜ ¡ 鏉 €佺 甯﹀ ﹀拰 ⁄ 彲 ヨ � у埗, 宸�轰笂 Æ浜 紭鍖 ª 剁壒鎬 庢‰ � Н ¶▼涓 櫠 currency1 寮 �鍙樺Ł灏 鍥犺€Ø叾 ⁄ 鍙Œ˜ º˘ 厜鍚 鏉愭枡˘€ ‹鐨勬渶 庡€� � ˛�0m ; 鍚屾椂 庢‰ ¶▼ 堥 浜· »æ 鍦 鐞ı腑鐨勬€� � �鑳介€€鍖 €Ø ˜ � �. 庡ł璐�.鐨勬櫠 † ø澶œ櫠 ‹ �߀� 2 ´晥 �HIT ¡ 鐨 ‹鐨 紓璐ㄧ粨缁撴瀯  , 鍦 n 缁撴垚缁†殑鍚屾椂瀹屾垚浜嗗崟鏅剁 鐨 〃闈㈤挐鍖 澶� � уぇ闄嶄綆浜 〃闈 €佺晫闈� �婕忕數娴 鎻愰 浜·數姹 晥 囥€傜洰 岺 � IT ¡鐨 疄楠Ø 鏁堢巼宸�杈惧 23[ 3] , 甯傚 200W 缁¢欢鐨勭數姹 晥 „揪鍒�9. 5[ 2] 銆� 3 ǔ瀹œ€�HIT ¡鐨 厜 хǔ瀹œ€уソ, 鐞 §¥currency1»ºfi闈炴櫠 ¡� 鏅舵€佺 寮傝川缁撲腑鐨 潪鏅剁 Æ ℃ 鍙˙ � � StaeblerWronski 鏁�€¸浼⁄嚭 “ 浼奸潪鏅剁 澶槼鑳界數姹犺浆 晥 囧洜鍏 収鑰� � �»伴€€鐨勭 璞 �HIT ¡鐨勬‰ ︾ǔ瀹œ€уソ, 涓庡崟鏅剁 ¡�- 0. 5/ 鐨勬‰ ︾郴鏁“浉姣 �HIT ¡鐨勬‰ ︾郴鏁板彲杈惧 - 0. 25/ , ¡ 充娇鍦ß厜 у崌 儏 典笅 嶆 濂界殑杈�鍑篬 4] 銆� 4 庢垚 �HIT ¡鐨 £ ﹁ , 鍙 互鑺傜渷 鏂� 庢‰宸ヨ壓鍙 互鍑� 灏˛兘閲忕殑 堣€ 骞朵笖鍏佽閲¶ƒ寤変环»æ � ; ´晥 娇寰 湪鐩稿悓杈 嚭ˇ熺巼鐨勬潯 朵笅鍙 互鍑忓皯 ¡鐨 ‰绉� €屾 鏁堥檷 �姹犵殑鎴愭˘銆�2 HIT 澶 槼鑳界數姹犵殑鍙戝睍 “ 2. 1 HIT 澶 槼鑳界數姹犵殑 € 灞 � 1990 骞 鏃ユ˘� Sanyo 鍏 徃 €鏃 濮嬬爺绌跺紓璐ㄧ粨澶 槼鑳界數 姹· 5] 銆�992 骞 �T anaka 氨鍒«笅paS i H/ iaS i H / nc Si 缁撴瀯澶 槼鑳界數姹犲厜 佃浆 晥 � 8. 1鐨勭邯› 骞跺皢 甯� � �夋˘寰佽 灞傜殑缁撴瀯绉 箣涓 IT 缁撴瀯[6] 銆 鍚� 涓 浗銆佺編鍥姐€佸痉 鍥姐€ 硶鍥姐€ 剰澶у埄銆佽嵎鍏“瓑鍥藉 熺浉缁 ф姇鍏 HIT 澶 槼鑳界數姹犵殑§¥currency1涓 »� �[ 3, 4, 7- 9] 涓哄 鍥界爺绌剁殑HIT ¡鐨勭 绫汇€佸埗�澶囧伐 轰互鍙婄數姹 墍鑳借揪鍒“殑杞 崲鏁堢巼鎯呭喌 銆備负 « 姝ユ彁�¡鐨勬晥 鍏剁爺绌朵富 佷¥閲嶄簬 ヤ笅鍑犱釜鏂归‰銆� � 1 寮傝川缁撹兘甯︾粨鏋勭殑浼樺寲HIT ¡涓 ¯缁熺數姹 渶澶х殑鍖哄埆灏 槸闈炴櫠 笌鏅朵綋 �鏋勬垚鐨 紓璐ㄧ粨缁撴瀯銆傞€ 繃 捐 寮傝川缁†晫闈 殑ˇ 瀿樺 鑾峰 鍚堥€傜殑鑳藉 缁撴瀯, ユ彁 數姹犵殑杞 崲鏁堢巼銆備互 Sanyo 鍏 徃H IT ¡涓轰緥[10] , 鍦 �p aSi/ i aSi/ n cSi 鐨 紓璐ㄧ粨缁撴瀯涓 闈炴櫠 笌 櫠 currency1晫闈 环甯ˇ綅閿欒 灏 ヤ究鏀¿泦绌虹┐� � � � , 鍚屾椂– 鐨¢綅閿欒 灏藉彲鑳藉ぇ� , ラ樆姝 數瀛愮殑 繃銆傚紓璐ㄧ粨ˇ 瀿樺 鐨 ′富 槸 繃  у埗闈炴櫠 ¡滅殑 Н鍙 暟鏉 疄 �鐨勩€�» � 涓栫晫HIT 澶 槼鑳界數姹犵殑§¥currency1 “ Table 1 Research stat us of HIT solar cells in the wor ld 鍥藉/ 曚綅鏅朵綋 �绫诲瀷惁缁掗‰鑳岄‰鍦哄伐 ¯晥 � 鏂¶鏃ユ˘/ Sanyo CZn 痠/ naSi PECVD 23 [ 3] 寰峰浗/ HMI FZn 痭aSi PECVD 19. 8 [ 7] 寰峰浗/ HMI FZp 痯aSi PECVD 18. 5 [ 8] 缇庡浗/ NREL FZp 痭aSi HWCVD 19. 1 [ 9] 缇庡浗/ NREL CZp 痭aSi HWCVD 18. 7 [ 9] 涓 浗 / 涓 �闄� Zp 鍚 �l HWCVD 17. 36 [ 4] 2 闈炴櫠 呭‹鐨 埗澶囨 ł�HIT ¡鐨 潪鏅剁 灞傞€⁄父 ㄧ瓑绂诲瓙Œ炲己鍖 姘¥浉 � Н PECVD € 繘»Ø埗澶嘯  7, 8, 11, 12] 銆傝繎骞存‹, 涓 �闄 爺绌剁闄�寮犵兢鑺崇瓑[13, 14] 缇庡浗鍥藉 鍙 啀 熻兘婧愬疄楠Ø   NERL T. H. Wang 塠 15] 閲¶ƒ鐑 笣Œ炲己鍖 姘¥浉   Н HWCV D € �鍒跺 浜唒 嬭 殑� HIT ¡銆備笌PECVD 鐩 瘮, HWCVD 浜�熺殑 瀛愯兘閲忚 鑳 鏁堥´鍏嶇 瀛愮殑杞板嚮� � � , 鍚屾椂鍙 £ �“簬 鐞· „〃闈 殑 兘 熷瓙姘 鍒跺 ¶▼涓殑 杈� � � � �灏 涓嶆Æ � Si H ‹ 銆 澶� 缇庡浗˛界 宸 澶  у鐨�B. Jagannathan 塠 16] ƒ鐩存 婧呭 € 埗澶  p �HIT ¡, 鍦�. 3cm2 鐨 ‰绉 笂寰 浜� 50mV 鐨 數 嬪拰30mA/ cm2 鐨勭 數娴併€� 3 鑳岄‰鍦 �BSF 鐨勭爺绌�鑳岄‰鍦 兘鏀 鑳岄‰澶嶅 熺巼 ⁄儗»‰鍙嶅 , €屾彁樺 數 €佸�澶 х 數娴併€傚埗澶„儗闈㈠満鐨¢¯缁 ł 閾 閲�łß€佺 ˘ ˙łß€佺 ˘ ˙ł 瓑, 浜 伐 兘 € 侀 繃绋 鍙� �鑳藉 鍒跺 鑳岄‰鍦哄啀 � Н闈炴櫠 ¡ €備笌HIT ¡ 庢‰宸ヨ壓鍏 鐨 埗澶囧伐 轰富 鍦ß崟鏅剁�鑳岄‰  Н閲嶆 鏉傞潪鏅剁 � �¡¢Ł鎴愯儗闈㈠満銆 oru Sawada 塠 17] ECVD ł 湪n 嬭 �涓 埗澶囧嚭HIT 缁撴瀯 i/ n aS i 鐨 儗闈㈠満銆傝 鑳岄‰鍦哄埄 “ 寮�璐ㄧ粨鐨勭壒鎬 涓ˆ渶 侀 ¯ 灏 兘› 垚銆傜粨鏋 � � HIT 缁撴瀯鑳岄‰鍦 揪鍒 姣¥ 姘ч挐鍖 濂界殑»‰ 寲鏁¡¢銆£. Ves chet ti 塠18] ƒ鍏 ⁄銆佺 绂诲瓙łß¥瀹 浜嗗ƒ§currency1儗闈㈠満 L ocal BSF , 涓庡 闈 Н Full 閾 閲˛儗闈㈠満鐩 瘮, 寮€ 數 嬪ぇ澶 ф彁 杈惧 浜� �76mV, 涓“ «IT ¡寮€ 數 嬬殑 €樺€‹€�H. D. Goldbach 塠19] cSi 鍒朵›浜唒 «IT ¡鐨 儗闈㈠満銆傚洜涓�.cSi 姣fiS i 夋 殑 ¯ 鏁堢巼, ˘€ ヨ兘瀹 �娴 鐨勬 鏉 €岄檷 庢fl娲 兘� , › 垚鎬ц兘浼樿 鐨 儗闈㈠満, 鎻愰 ¡杞 崲鏁堢巼銆 暟– ā†熺粨鏋 〃 鍦‡ 嬭 ·� IT ¡鐨�鑳岄‰Œ炲 涓€灞傞 ¯ 鐨¶ 灞傚彲 ヨ鍒‚儗闈㈠満鐨¢› „數�姹犵殑鏁堢巼鎻愰 鍒�4. 35[ 20] 銆� 4 » 鏉愭枡鐨 € » 鐨勭 ”¸鍚� ¡鐨 浆 晥 »涓嶅悓銆  ucci M 塠21] §¥currency1鍙˙ , n 嬭 殑HIT ¡ 簬寮傝川缁撹兘甯︾粨鏋�鏂归‰鐨¢紭ˇ 鍏惰浆 晥 ¶‰æ簬� p 嬭 殑澶 槼鑳界數姹� 唒 嬭 お闃宠兘 ¡–†晫闈 殑 ‹杈冧綆, 鍥 撲簬鍒跺�銆  . H. Wang 塠 15] 鍒嗗埆 嬪 ¿ �FZ 呭拰鐩存 CZ ›» 鍒舵垚浜 IT ¡, 缁撴¢鍙˙ » 涓 Z 呭お闃崇數姹犵殑鏁堢巼�HIT 澶 槼鑳界數姹犵殑鍙戝睍姒傚喌 / 鍙插皯椋 瓑 131 浜´Z 呫€傜編鍥藉浗瀹跺彲 嶇鑳 瀹為獙瀹ˆ殑Wang Q i 塠 9] �H WCV D ł 湪FZ » 涓 埗澶¶殑 HIT 澶 槼鑳界數姹犵殑鏁堢巼宸�杈惧 19. 1銆備˜ ¯Z currency1殑 锋˘æ簬CZ 鍥 ˙ ¨粠鏁堢巼�屾垚 «鏂归‰缁 鑰 ˚ , 夋¸鍚堥€傜殑» 銆傚 澶� 涓轰 鍑忓˝¡– ¥灏 厜鐨 ˛灏勭巼, 缁掗‰» 熻� ¥ƒ鍒ˇ IT ¡涓 �骞朵笖鍙 浜嗗濂界殑鍑忓˛灏勬晥鏋 10, 22] 銆� 5 鍙戝 鏋 鏂 殑闈 涓轰 鍑忓皯闈炴櫠 呭‹– ¥灏 厜鐨 鏀 鍙Œ˜ ß 甯﹂ 鏉愭枡�傚 鏅剁� cSi 銆佺 鏅剁� ncSi 変›涓哄 灏勬 , 鎻愰 鍏 殑 �¶巼銆 . Summont e 塠 23] FPECVD € 繃´ 姘� �绋€閲婄殑姘 , 鍦 嬭 曚笂鍒跺 浜 � �.cSi 鍙戝 鏋 缁撴¢ � �涓 � Si 鍙戝 鏋佺浉姣�H IT ¡鐨勭 數娴佸拰杞 崲鏁堢巼 � 庢 鎻愰 銆備腑绉 櫌 撴墍 � 塠  24] 熺ƒRFPECVD 鍦 嬭 曚笂鍒跺 鍑轰 � n cS i 鍙戝 鏋併€傞 PECVD ł曚互澶 涓� �绉 櫌§¥currency1 櫌鐨 ¯缇 Æ 塠25] ƒHWCV D ł 埗澶 cSi 鍙戝 鏋併€傚 澶 �J. DanmonLacoste 塠 26] ECVD ł 湪› 垚澶œ€佺� pmS i 鐨勬潯 朵笅鍒跺 浜 � IT ¡鐨勬˘寰佸‹, 娴嬭 缁�鏋 “mSi 鐨 ª娴佸瓙 夋晥– 姣fiSi 樺嚭1 涓 暟閲忕£銆�2. 2 HIT 澶 槼鑳界數姹犵殑浜 т 鍖栫 �HIT ¡ Ł �997 骞存姇鍏 競鍦轰互鏉 灞 涓 Ø€�鍥 涓� �004 骞Œ 绫诲お闃宠兘 ¡˘€ 犲競鍦轰º 4] , ‡2 鍙� 鏁板 � IT ¡宸插 æ Ø厜浼忓競鍦� 鐨 競鍦轰º€傚湪§¥currency1鍙 叾澶ц� ′£涓⁄寲鐨 繃绋”腑, S anyo ⁄嚭浜ı �璐 銆傝 1994 骞 IT ¡鐨勭爺绌跺伐 ¢ 寰łø§存€ц繘灞 鍦� �1cm2 闈 Н涓 埗澶囧嚭杞 崲鏁堢巼涓� 0. 0 鐨‡ IT ¡[ 17] ユ‹, Sanyo 鍏 徃鍦ß伐涓⁄寲 œ£涓 ß鍑轰 鍚嶄负  HIT Power21 鐨勭數姹犵 杞 崲鏁堢巼樿揪� 17. 39 , 瀹 96 嘓IT ¡缁勬垚, 杈 嚭ˇ熺巼涓�80W銆傚悓鏃 �Sanyo 鍏 徃 ´ß鍑轰 鑳 浛 e眿¸�鐡︾ 鐨 鎬т环姣斿お闃崇數姹 ā鍧 �HIT power roof 銆傚弻闈 ā鍧� HIT power double 殢鍚庨‰涓 埆 傚 瀹夎 鍦ß湴闈 互鍙� � � �鍥Œ 夎鏂戒笂� [ 27] 銆�鍥 � 2004 骞Œ 绫诲お闃宠兘 ¡˘€ 犲競鍦轰º �Fig. 2 Themarket share of various types of solar cells in 2004 2003 骞 � � Sanyo 鍏 徃 ß嚭浜 緭鍑哄姛 负 200W 鐨�H IT ¡ Ł, Ł鐨勭數姹犺浆 晥 „揪鍒�9. 5 , Ł鏁堢巼涓�7, 骞朵笖 规€ф 浜嗗ぇ骞 彁 骞Œ 甸噺姣¨¯缁熷お闃� �¡澶⁄嚭43[ 28] 銆�006 骞 �HIT ¡鐨勬渶樿浆 晥 „揪鍒�21. 8 [29] , 270W 鐨‡IT ¡ Ł棣 鍦º 娲蹭笂甯� 宸ョ▼涓�闃宠兘 ¡ Ł鐨勭ƒ閲忓彲 嶅噺灏˙ 25銆�2009 骞 � � S anyo 鍏 徃鍙堝皢 HIT ¡鐨 浆鍖 晥 囨彁�鍒�3 鐨¢æ Ł邯›ß€傚悓骞 – 叕鍙稿張 £ ˇ粎涓¯˙ � � �1/ 2 宸﹀彸鐨�8m 鐨‡IT 澶 槼鑳界數姹犲疄  22. 8 鐨勭數姹�厓杞 寲鏁堢巼 寮€ 數 �  V oc 涓�. 743,  I sc 涓�38. 8mA/ cm2 , 濉 厖鍥犲瓙 FF 涓�9. 1 , ¡ 厓闈 Н涓�100. 3cm2 銆傝櫧鐒跺£ ﹀噺 ·數姹犲崟鍏 浆 晥 囧嵈鍙檷 � �浜�. 2銆傜 浜庡噺灏戜 垚 �/ 2 鐨勭 鐨¢娇 噺� , €负HIT ¡鐨¢綆鎴愭˘鍖 杈œ 閬撹 銆傚悓鏃禨anyo 垝 戞湡灏�姝ゆ˚ œ “簬閲忎£ , 骞跺湪FY2013 璧㈠ 鏃ユ˘鍏変紡甯傚満鐨勬渶澶�介�, €屾 哄嚭HIT ¡鍏锋 鏋佸ぇ鐨 灞 ›ˇ €�鍥 � Sanyo §斿埗鐨¢æ 屾渶´晥 嘓IT ¡宸 �⁄秴 瀷鐨‡IT ¡ 鍙 �Fig. 3 HIT solar cell lef twith the highest ef ficiency in the world and the ultrathin HIT solar cellright developed by Sanyo 寰峰浗鍦currency1蒋 舵ā†熻 绠椾腑鍙 浜 澶 х殑 涙, 胯浆鍖 晥 �鎻愰 鍒 19. 8; 缇庡浗§¥currency1鐨‡IT ¡鏁堢巼 熻揪鍒 19. 1銆備˜ 浜庢牳蹇冨伐 ¯˚ 拰鍏fl 惧� € £涓⁄寲 �  浜у伐 繕涓嶆槸寰¡垚¿ 浜� т 鍖栫數姹 晥 ¸ � 栦滑灏嗗湪悗鐨勭爺绌朵腑澶у姏鏀 繘宸ヨ壓, 瀹 澶ц� ′£涓⁄寲 œ£銆�3 缁撴潫–�HIT ¡铏界劧鍙戝睍寰堣 嗘槸 嶇劧瀛樺湪 稿  銆傜 � � �浜庣浜ц繃绋”腑鐨勬瘡涓€姝 伐 姹傞兘寰堜弗‚ ˘€ 湪淇濊瘉´晥� �鐨勬儏 典笅, 澶ц� 殑閲忎£ 橀渶 佽繘涓€姝ョ殑§¥currency1銆侶IT ¡铏�鐒舵晥 囧凡杈�3, 鎴愭˘ 熷湪 愭笎闄嶄綆, 嗗 垚 粛鐒惰繙�浜 ¯缁 ł 殑鍙˙數鎴愭˘銆�鐩 墠 ,H IT ¡§¥currency1 €澶氱殑 潪鏅剁� / 櫠 呭紓璐ㄧ粨 �姹 鍏朵腑寤変环闈炴櫠 currency1殑 噺寰堝皯� , 鑰环‚槀璐电殑 櫠 粛 �澶œ暟銆傚洜姝 涓轰 婊� ¤冻鍥 皯 œ£– お闃宠兘 ¡缁¢欢鐨 渶姹 �鍦“互鍚庣殑§¥currency1涓 涓€鏂归‰ 斿ぇˇ 鍙戞 € 湪淇濊瘉 ¡杞 崲�鏁堢巼鐨 墠鎻愪笅闄嶄綆HIT ¡鐨 £ 鍙ˇ 鏂归‰ ß粔 锋 鏂� �f浛 锋˘ 傝吹鐨 崟鏅剁 鏉愭枡鏉ラ檷 庢垚 傚 鏅剁 銆傚悓鏃朵»� � � �鍙 互 繃寮€鍙戞 € ‹闄嶄綆 櫠 currency1殑 œ£鎴愭˘銆�鍙傝€º枃鐚�1 涓 矝姝� 涓稿北鑻 不 , 腑– ´€� ц兘H IT 澶 槼 ¡鐨勭壒鎬�鍙 叾 ¥ƒ 嶆櫙[ J] . 涓婃 靛姏, 2006, 4 372 2 Tanaka M ako to, Okamoto Shing o, Tsug e Sadaji, et al. De v elo pment of H IT solar cells w ith mo re than 21 conver 132 鏉愭枡–‚A缁 堪„�. 2011 骞 涓 ”� � � �5 »7 �sion efficiency and commer cializat ion of highest perfo rmance H IT mo dules[ C] / / WCPEC3 Or ganizing Commit tee. Osa ka, Japan, 2003 955 3 SANYO Electric Co. Ltd. SANYO develo ps H IT so lar cells w ith wo rlds hig hest ener gy conversio n efficiency o f 23. 0 [ EB/ OL] . 2009521 [ 2009715] . http us. sany o. com/ New s/ SANYODevelopsH ITSo larCellsw ithWo rld sH ighest Ener gyCo nversio nEfficiencyo f230 4 寮犵兢鑺 辩編鑺 鍒æ赴鐝 ´晥 Æ 鏅朵綋 呭紓璐ㄧ粨 � � � � � �姹犵殑§¥currency1[ J] . 澶 槼鑳�  2006 4 40 5 Tag uchi M , Tanaka M, Mat suyama T, et al. Improv ement of the co nv ersio n efficiency o f polycry st alline silico n thin film solar cell [ C ] / / T echnical Dig est o f the Inter nat ional PVSEC5. Ky oto . Japan, 1990 689 6 Takahama T, T aguchi M, Kuro da S, et al. High efficiency single and po lycr ystalline silicon so lar cells using ACJH IT structure[ C] / / 11t h EC PVSEC. Montr eux , 1992 1057 7 Schm idt M , Ko rte L, Laades A, et al. Phy sical aspects of aSi H/ cSi hetero junctio n solar cells [ J ] . T hin Solid Films, 2007, 515 7475 8 Angermann H, Kor te L, Rappich J, et al. Optimisation of electr onic inter face pro per ties of aSi H/ c Si het er ojunc tio n solar cells by wetchemical sur face pr et reatment [ J] . Thin Solid Films, 2008, 516 6775 9 Wang Q, Pag e M R, Iwaniczko E, et al. Cr ystal silico n he ter ojunct ion solar cells by hotw ire CVD[ C] / / 33th IEEE PVSC. Califor nia, 2008 1 10 Tag uchi M, Terakaw a A, Mar uyama E, et al. Obtaining a hig her Vo c in HIT cells [ J ] . Pro g Pho tovo lt Res Appl, 2005, 13 481 11 Uly ashin A G, Jo b R, Scher ff M, et al. T he influence of the amor phous silico n deposit ion tem per at ur e o n the efficiency of the ITO/ aSi H / CSi hetero junct ion HJ sola r cells and pr operties o f inter faces[ J] . Thin Solid Films, 2002, 403404 359 12 寮犲 寮 寮犵淮 姝︾編浼 ˛崇背 ¡¢埗澶囧 � � � � HIT 澶 槼鑳界數姹· J] . ˇ熻兘鏉愭枡, 2007, 38 10 1741 13 寮犵兢鑺 辩編鑺 鍒æ赴鐝 鐑笣鍖 姘¥浉 � � � � Нn c Si H Æ鍙妌cSi H / cSi 寮傝川缁 お闃崇數姹· J] . 澶 槼鑳�瀛︽‚, 2006, 27 7 691 14 寮犵兢鑺 辩編鑺 鍒æ赴鐝 ´晥 噉� � � ncSi H / pcSi 寮傝川缁�澶 槼鑳界數姹·  J] .  �  2007, 28 1 96 15 Wang T H , Iwaniczko E, Pag e M R, et a l. Effect of em itter deposition temper atur e on surface passivatio n in hotw ire chemical v apo r depo sited silicon hetero junction so lar cells [ J] . Thin Solid Films, 2006, 501 12 284 16 Jagannat han B, Ander so n W A, Co leman J, et al. Amor phous silicon/ ptype cr ystalline silicon hetero junct ion solar cells[ J] . Solar Energ y Mat er Solar Cells, 1997, 46 4 289 17 Saw ada T, T erada N, Tsuge S, et al. H ig h efficiency aSi/ cSi heter ojunction solar cell[ C] / / Fir st WCPEC. Haw aii, 1994 1219 18 Veschett i Y, Muller J, Damonlaco ste J, et al. 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