JUSUNG PECVD 设备说明(1)-solarbe文库

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Safety Manual CYCLONE TM PLUS JUSUNG Engineering Co., Ltd. Page Revision 1.0 1-1 User’s ManualPreliminary World’s Best People, World’s Best Products, World’s Best Company Solar Cell System User’s Manual In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 1 - Contents I. Safety 1.1 Safety Hazard Alert 1-3 1.2 Factors with safety caution 1-7 1.3 Guidance to the safety of the system 1-8 1.4 Emergency OffEMO 1-10 1.5 Mechanical Hazards 1-12 1.6 Electric Hazards 1-19 1.7 Gas Hazards 1-21 1.8 Thermal Hazard 1-33 1.9 Fire and Explosion Hazards 1-36 1.10 Laser Hazards 1-41 1.11 Vacuum Hazards 1-42 1.12 Environmental Hazards 1-44 1.13 RF Hazard 1-45 1.14 Other Danger 1-46 1.15 Guide in Accident by High-pressure Gas 1-48 1.16 Guid in Accident by Gas poisoning 1-50 1.17 Ventilation of Gas Cabinet 1-51 1.18 Gas handing with safety caution 1-53 1.19 Lockout/Tagout procedure 1-54 1.20 Types and Location of Interlocks 1-57 1.21 Safety label location 1-62 1.22 Specialty Gas Material Safety Data Sheet 1-66 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 2 - II. Functional Description 2.1 System Overview 2-1 2.2 Hardware Specification 2-2 2.3 Transfer Chamber 2-3 2.4 Load Lock Chamber 2-6 2.5 Pre heat Chamber 2-7 2.6 Load lock pre heat chamber 2-8 2.7 PECVD Single Substrate Process Chamber 2-10 2.8 MOCVD Single Substrate Process Chamber 2-13 2.9 Gas Rack Gas Delivery System 2-15 2.10 Chamber Cooling System 2-37 2.11 Vacuum System 2-42 2.12 Heater System 2-50 2.13 RF Plasma System 2-53 III. Installatoin 3.1 Site Requirement 3-2 3.2 Floor Space and Loading 3-2 3.3 Site Requirements for Moving the system 3-2 3.4 Initial Inspection 3-2 3.5 Environments 3-3 3.6 Inspection prior to executing Power-on 3-4 3.7 Power-On execution procedure 3-5 3.8 Power-Off procedure 3-6 3.9 Ventilating Gas Cabinet 3-6 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 3 - 3.10 Packing and transporting 3-7 3.11 System Trun Off Procedure 3-7 3.12 System Trun On Procedure 3-8 3.13 Abnormal operation of Process or Transfer Chamber 3-9 3.14 Emergency Off EMO 3-10 IV. Facility Requirements 4.1 System Overview 4-2 4.2 Electrical Power Diagram 4-4 4.3 GN2 Facility Requirement 4-10 4.4 CDA Facility Requirement 4-16 4.5 PCW Facility Requirement 4-19 4.6 City Water Facility Requirement 4-22 4.7 DrainAcid Facility Requirement 4-24 4.8 General Exhaust Facility Requirement 4-26 4.9 Toxic Exhaust Facility Requirement 4-28 4.10 Pumping Line Facility Requirement 4-31 4.11 Specialty Gas Facility Requirement 4-34 4.12 DI Water Facility Requirement 4-39 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 4 - V. Operation 5.1. GUI Graphic User Interface 5-2 5.1.1. Structure of GUI 5-2 5.1.2. The Layout Screen of GUI 5-3 5.1.2.1 PC Screen Map 5-3 5.1.2.2 Top Panel 5-4 5.1.2.3 Bottom Panel 5-4 5.1.3. Log Off Screen 5-5 5.2 Easy Screen 5-6 5.2.1 Easy Screen Jobs 5-6 5.2.2 Easy Screen TM/LL/HT Chamber Popup 5-8 5.2.3 Easy Screen PMx Chamber Popup 5-10 5.3 Jobs Screen 5-12 5.3.1 Jobs Screen Main 5-12 5.3.2 Jobs Screen Process Module’s System Status 5-14 5.3.3 Jobs Screen Transter Module’s System Status 5-14 5.3.4 Jobs Screen Heat Chamber System Status 5-15 5.3.5 Jobs Screen Load-lock System Status 5-15 5.3.6 Jobs Screen PIO System Status 5-16 5.3.6.1 PIO System Screen PIO Status Popup 5-17 5.4 System Screen 5-19 5.4.1 System Screen TMC 5-19 5.4.1.1 TMC System Control 5-19 5.4.1.1.1 TMC System Control Vacuum System 5-20 5.4.1.1.2 TMC System Control TM System Status 5-20 5.4.1.1.3 TMC System Control Heat Chamber System Status 5-21 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 5 - 5.4.1.1.4 TMCSystem ControlProcess Module System Status 5-21 5.4.1.1.5 TMCSystem ControlLoad-lock System Status 5-22 5.4.1.1.6 TMCSystem ControlLoad-lock Command Panel 5-23 5.4.1.1.7 TMCSystem ControlHeat Chamber Command Panel 5-24 5.4.1.1.8 TMCSystem ControlLamp Heater Popup 5-25 5.4.1.1.9 TMCSystem ControlTMVac.Robot Command Panel 5-26 5.4.1.1.10 TMCSystem ControlVac.Robot Popup 5-27 5.4.1.1.11 TMCSystem ControlTM Transfer Popup 5-28 5.4.1.2 TMC Glass Synchronize 5-29 5.4.1.3 TMC I/O Monitor 5-30 5.4.2 System Screen PMx PECVD 5-31 5.4.2.1 PMxPECVD Chamber 5-31 5.4.2.1.1 PMxPECVD Chamber Process Status 5-31 5.4.2.1.2 PMxPECVD Chamber Chuck U/D Motor 5-32 5.4.2.1.3 PMxPECVD Chamber RF Generator 5-34 5.4.2.1.4 PMxPECVD Chamber RF Matcher 5-35 5.4.2.1.5 PMxPECVD Chamber Chuck Heater 5-36 5.4.2.1.6 PMxPECVD Chamber Wall Heater 5-38 5.4.2.1.7 PMxPECVD Chamber Mode/State/Idle 5-39 5.4.2.1.8 PMxPECVD Chamber RPSC 5-39 5.4.2.1.9 PMxPECVD Chamber Main Count Data 5-40 5.4.2.1.10 PMxPECVD Chamber Process Ready Check List 5-41 5.4.2.1.11 PMxPECVD Chamber Auto function Command 5-44 5.4.2.1.12 PMxPECVD Chamber Line2, DV-00 5-56 5.4.2.1.13 PMxPECVD Chamber FRV 5-56 5.4.2.1.14 PMxPECVD Chamber SRV 5-56 5.4.2.1.15 PMxPECVD Chamber Throttle Valve 5-57 5.4.2.1.16 PMxPECVD Chamber Dry Pump 5-58 5.4.2.1.17 PMxPECVD Chamber Others 5-59 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 6 - 5.4.2.2 PMxPECVD Gas 5-60 5.4.2.2.1 PMxPECVD Gas UV- 5-61 5.4.2.2.2 PMxPECVD Gas PV- 5-61 5.4.2.2.3 PMxPECVD Gas DV- 5-61 5.4.2.2.4 PMxPECVD Gas DV-00,LINE01,LINE02 5-62 5.4.2.2.5 PMxPECVD Gas MFC 5-62 5.4.2.2.6 PMxPECVD Gas Process Data 5-63 5.4.2.3 PMxPECVD P/M Items List 5-64 5.4.2.3.1 PMxPECVD P/M Items List By Depo. ThicknessA 5-64 5.4.2.3.2 PMxPECVD P/M Items List By Process Count 5-64 5.4.2.3.3 PMxPECVD P/M Items List Clean Count 5-65 5.4.2.4 PMxPECVD I/O Monitor page 5-66 5.4.3 System Screen PMx MOCVD 5-69 5.4.3.1 PMxMOCVD Chamber 5-69 5.4.3.1.1 PMxMOCVD Chamber Process Status 5-69 5.4.3.1.2 PMxMOCVD Chamber Chuck U/D Motor 5-70 5.4.3.1.3 PMxMOCVD Chamber Chuck Heater 5-72 5.4.3.1.4 PMxMOCVD Chamber Wall Heater 5-73 5.4.3.1.5 PMxMOCVD Chamber Heat Exchanger 5-74 5.4.3.1.6 PMxMOCVD Chamber Mode/Status/Idle 5-75 5.4.3.1.7 PMxMOCVD Chamber Main Count Data 5-76 5.4.3.1.8 PMxMOCVD Chamber Process ready Check List 5-76 5.4.3.1.9 PMxMOCVD Chamber Auto Function Commands 5-79 5.4.3.1.10 PMxMOCVD Chamber Line2, DV-00 5-92 5.4.3.1.11 PMxMOCVD Chamber FRV 5-92 5.4.3.1.12 PMxMOCVD Chamber SRV 5-92 5.4.3.1.13 PMxMOCVD Chamber Throttle Valve 5-93 5.4.3.1.14 PMxMOCVD Chamber Dry Pump 5-94 5.4.3.1.15 PMxMOCVD Chamber Others 5-95 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 7 - 5.4.3.2 PMxMOCVD Gas 5-96 5.4.3.2.1 PMxMOCVD Gas UV- 5-97 5.4.3.2.2 PMxMOCVD Gas PV- 5-97 5.4.3.2.3 PMxMOCVD Gas DV- 5-97 5.4.3.2.4 PMxMOCVD Gas AV- 5-98 5.4.3.2.5 PMxMOCVD Gas MFC- 5-98 5.4.3.2.6 PMxMOCVD Gas Process Data 5-99 5.4.3.2.7 PMxMOCVD Gas Source Tank 5-99 5.4.3.3 PMxMOCVD P/M Items List 5-100 5.4.3.3.1 PMxMOCVD P/M Items List By Depo. Thickness 5-100 5.4.3.3.2 PMxMOCVDP/M Items ListBy Process Count Table 5-101 5.4.3.3.3 PMxMOCVDP/M Items ListClean Count Table 5-101 5.4.3.4 PMxMOCVD I/O Monitor page 5-102 5.5 Recipe Screen 5-105 5.5.1 Recipe Route 5-105 5.5.1.1 Recipe Route File Control Panel 5-106 5.5.1.2 Recipe Route Data Control Panel 5-107 5.5.2 Recipe TMC Heat Recipe 5-108 5.5.2.1 Recipe TMC File Control Panel 5-109 5.5.3 Recipe PMx PECVD 5-110 5.5.3.1 Recipe PMx PECVD Others 5-110 5.5.3.2 Recipe PMx PECVD Step Sub Loop 5-111 5.5.3.3 Recipe PMx PECVD 5-112 5.5.3.4 Recipe PMx PECVD Recipe Factor 5-112 5.5.4 Recipe PMx MOCVD 5-114 5.5.4.1 Recipe PMx MOCVD Process Others 5-114 5.5.4.2 Recipe PMx MOCVD Process Step Sub Loop 5-115 5.5.4.3 Recipe PMx MOCVD Process 5-116 5.5.4.4 Recipe PMx MOCVD Recipe Factor 5-116 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 8 - 5.5.4.5 Recipe PMx MOCVD ALD Others 5-117 5.5.4.6 Recipe PMx MOCVD ALD Sub Loop 5-118 5.5.4.7 Recipe PMx MOCVD ALD Data Table Factor 5-118 5.5.4.8 Recipe PMx MOCVD ALD Gas Panel Factor 5-119 5.6 Data Log Screen 5-120 5.6.1 Data Log Event 5-120 5.6.2 Data Log Job 5-122 5.6.3 Data Log Process 5-123 5.6.3.1 Data Log Process Data Table 5-123 5.6.3.1.1 Data Log Process Set Log Items 5-124 5.6.3.2 Data Log Process Plot Chart 5-126 5.6.3.2.1 Data Log Process Set Plot Items 5-127 5.7 Setup Screen 5-130 5.7.1 Setup User 5-130 5.7.2 Setup CTC 5-131 5.7.3 Setup TMC 5-133 5.7.3.1 Setup TMC Vacuum 5-133 5.7.3.2 Setup TMC General 5-134 5.7.3.3 Setup TMC Heater 5-135 5.7.4 Setup PMxPECVD 5-137 5.7.4.1 Setup PMxPECVD Gas 5-137 5.7.4.2 Setup PMxPECVD Vacuum 5-138 5.7.4.3 Setup PMxPECVD System I 5-140 5.7.4.4 Setup PMxPECVD System II 5-141 5.7.4.5 Setup PMxPECVD Heater 5-143 5.7.5 Setup PMxMOCVD 5-144 5.7.5.1 Setup PMxMOCVD Gas 5-144 5.7.5.2 Setup PMxMOCVD Vacuum 5-146 5.7.5.3 Setup PMxMOCVD System I 5-147 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 9 - 5.7.5.4 Setup PMxMOCVD System II 5-148 5.7.5.5 Setup PMxMOCVD System III 5-150 5.7.5.6 Setup PMxMOCVD System IV 5-151 5.8. Alarms Screen 5-152 VI. Maintenance 6.1 Preparation and Restoration 6-2 6.1.1 Chamber Back up Procedure 6-2 6.1.2 Chamber Cooling Down Procedure before start Vent 6-4 6.1.3 Chamber Pump Down 6-5 6.1.4 Chamber venting 6-8 6.1.5 Non-Toxic Gas의 Cycle Purge 6-12 6.1.6 Toxic Gas Cycle Purge 6-13 6.1.7 MFC Purge 6-14 6.1.8 MFC Replacement Procedure 6-15 6.1.9 Gas leak test on Gas cabinet pipe 6-16 6.2 Maintenance 6-17 6.2.1 Showerhead 6-17 6.2.1.1 Removing the Showerhead 6-17 6.2.1.2 Setting the Showerhead 6-21 6.2.1.3 Check List during removing procedure of the Showerhead 6-24 6.2.1.4 Check List when installing the Showerhead 6-25 6.2.2 Susceptor 6-26 6.2.3 RF Generator Replacement Procedure 6-31 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 10 - 6.2.4 RF Matcher Replacement Procedure 6-34 6.2.5 RF Test Procedure 6-37 6.2.6 RF Replacement Procedure 6-42 6.2.7 MOCVD JACKET Replacement Procedure 6-44 6.2.8 Pre heat chamber Lamp heater assembly Procedure 6-48 6.2.9 Servo motor Replacement Procedure 6-50 6.2.10 VAT Throttle Valve Calibration Procedure 6-52 6.2.11 IPC Replacement Procedure 6-63 6.2.12 System S/W Work Procedure 6-76 6.2.13 Patch Work Procedure of System S/W 6-81 Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-1 I. 安全 Safety 本章提供 Solar Cell system的安全指南事项. 有关Solar Cell的动作或维护的所有作业者必须熟知本章明示的安全注意事项. Notes 为了安全,本装备必须由株JUSUNG ENGINEERING的工程师或从JUSUNG ENGINEERING学习装备专业教育课程且得到教育认证的人来安装. 要移动装备或安装或重新安排则需联系株 JUSUNG ENGINEERING委任给株JUSUNG ENGINEERING技术者. 不要在没有JUSUNG技术者的帮助下无理作业. 装备没有正常安装时，会漏出到火灾、爆炸、机械性、电气性危险. 注意任意改造装备或解除、无视Interlock而使用装备时会暴露在有伤害危险的环境中严重时会有生命危险. Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-2 主要安全徽标的定义危险不躲避会发生深刻伤害甚至死亡的危险状况. 注意若不注意不太危险，但会发生引起造成装备的损伤或给人体造成伤害的潜在的危险状况.对特定作业要注意进行. NOTICE 通知适当的安全状况或显示对安全作业的一般性指示警告显示不躲避会造成深刻的伤害的潜在的危险状况. Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-3 1.1 装备安全危险警告Safety Hazard Alert 一般性警告引火性物质毒性物质高压电流高温注意爆炸危险夹手激光光线注意 RF危险齿轮咬合降落危险坠楼危险腐蚀性物质冲撞危险重量物使用注意 Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-4 Safety Marks and Description 警告齿轮咬合动弹的配件漏出. 手等会被夹到动弹的部位受伤害. 警告沉重的物体沉重的配件，为了躲避肌肉或腰的伤害，请利用恰当的技术或Lift Tool，两个人以上一起作业. 警告激光光线注意超出规定时间长时间在没有保护装备的情况下看Laser Beam . 这会产生永久性的视力损伤. 警告爆炸物资源Gas或残留物，焊接气体等引起爆炸会引起严重伤害或死亡. 执行作业